JPS62158823U - - Google Patents

Info

Publication number
JPS62158823U
JPS62158823U JP4721386U JP4721386U JPS62158823U JP S62158823 U JPS62158823 U JP S62158823U JP 4721386 U JP4721386 U JP 4721386U JP 4721386 U JP4721386 U JP 4721386U JP S62158823 U JPS62158823 U JP S62158823U
Authority
JP
Japan
Prior art keywords
gas inlet
raw material
reaction chamber
counter electrode
registration request
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4721386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4721386U priority Critical patent/JPS62158823U/ja
Publication of JPS62158823U publication Critical patent/JPS62158823U/ja
Pending legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
JP4721386U 1986-03-31 1986-03-31 Pending JPS62158823U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4721386U JPS62158823U (enExample) 1986-03-31 1986-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4721386U JPS62158823U (enExample) 1986-03-31 1986-03-31

Publications (1)

Publication Number Publication Date
JPS62158823U true JPS62158823U (enExample) 1987-10-08

Family

ID=30867601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4721386U Pending JPS62158823U (enExample) 1986-03-31 1986-03-31

Country Status (1)

Country Link
JP (1) JPS62158823U (enExample)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61198716A (ja) * 1985-02-28 1986-09-03 Toshiba Corp 薄膜製造装置
JPS62150712A (ja) * 1985-12-24 1987-07-04 Fuji Electric Co Ltd プラズマ気相反応装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61198716A (ja) * 1985-02-28 1986-09-03 Toshiba Corp 薄膜製造装置
JPS62150712A (ja) * 1985-12-24 1987-07-04 Fuji Electric Co Ltd プラズマ気相反応装置

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