JPS61111964U - - Google Patents
Info
- Publication number
- JPS61111964U JPS61111964U JP19956884U JP19956884U JPS61111964U JP S61111964 U JPS61111964 U JP S61111964U JP 19956884 U JP19956884 U JP 19956884U JP 19956884 U JP19956884 U JP 19956884U JP S61111964 U JPS61111964 U JP S61111964U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- internal
- deposition
- outer enclosure
- cylindrical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 20
- 230000008021 deposition Effects 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000003786 synthesis reaction Methods 0.000 claims description 4
- 239000012808 vapor phase Substances 0.000 claims description 4
- 239000002131 composite material Substances 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- 239000013078 crystal Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19956884U JPS61111964U (enExample) | 1984-12-27 | 1984-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19956884U JPS61111964U (enExample) | 1984-12-27 | 1984-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61111964U true JPS61111964U (enExample) | 1986-07-15 |
Family
ID=30759611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19956884U Pending JPS61111964U (enExample) | 1984-12-27 | 1984-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61111964U (enExample) |
-
1984
- 1984-12-27 JP JP19956884U patent/JPS61111964U/ja active Pending