JPS62123243U - - Google Patents
Info
- Publication number
- JPS62123243U JPS62123243U JP960386U JP960386U JPS62123243U JP S62123243 U JPS62123243 U JP S62123243U JP 960386 U JP960386 U JP 960386U JP 960386 U JP960386 U JP 960386U JP S62123243 U JPS62123243 U JP S62123243U
- Authority
- JP
- Japan
- Prior art keywords
- tubular substrate
- vapor phase
- phase synthesis
- inlet
- exhaust port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 238000003786 synthesis reaction Methods 0.000 claims description 5
- 239000012808 vapor phase Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 3
- 239000002994 raw material Substances 0.000 claims 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP960386U JPS62123243U (enExample) | 1986-01-28 | 1986-01-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP960386U JPS62123243U (enExample) | 1986-01-28 | 1986-01-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62123243U true JPS62123243U (enExample) | 1987-08-05 |
Family
ID=30795070
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP960386U Pending JPS62123243U (enExample) | 1986-01-28 | 1986-01-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62123243U (enExample) |
-
1986
- 1986-01-28 JP JP960386U patent/JPS62123243U/ja active Pending