JPS62152431U - - Google Patents
Info
- Publication number
- JPS62152431U JPS62152431U JP1986039734U JP3973486U JPS62152431U JP S62152431 U JPS62152431 U JP S62152431U JP 1986039734 U JP1986039734 U JP 1986039734U JP 3973486 U JP3973486 U JP 3973486U JP S62152431 U JPS62152431 U JP S62152431U
- Authority
- JP
- Japan
- Prior art keywords
- heat shield
- molecular beam
- beam source
- utility
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986039734U JPS62152431U (enExample) | 1986-03-20 | 1986-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986039734U JPS62152431U (enExample) | 1986-03-20 | 1986-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62152431U true JPS62152431U (enExample) | 1987-09-28 |
Family
ID=30853179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986039734U Pending JPS62152431U (enExample) | 1986-03-20 | 1986-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62152431U (enExample) |
-
1986
- 1986-03-20 JP JP1986039734U patent/JPS62152431U/ja active Pending
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