JPS62126371U - - Google Patents
Info
- Publication number
- JPS62126371U JPS62126371U JP1397486U JP1397486U JPS62126371U JP S62126371 U JPS62126371 U JP S62126371U JP 1397486 U JP1397486 U JP 1397486U JP 1397486 U JP1397486 U JP 1397486U JP S62126371 U JPS62126371 U JP S62126371U
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- resistance heater
- beam source
- crucible
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 2
- 239000011888 foil Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1397486U JPS62126371U (enExample) | 1986-02-04 | 1986-02-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1397486U JPS62126371U (enExample) | 1986-02-04 | 1986-02-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62126371U true JPS62126371U (enExample) | 1987-08-11 |
Family
ID=30803534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1397486U Pending JPS62126371U (enExample) | 1986-02-04 | 1986-02-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62126371U (enExample) |
-
1986
- 1986-02-04 JP JP1397486U patent/JPS62126371U/ja active Pending
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