JPS63121427U - - Google Patents

Info

Publication number
JPS63121427U
JPS63121427U JP1325487U JP1325487U JPS63121427U JP S63121427 U JPS63121427 U JP S63121427U JP 1325487 U JP1325487 U JP 1325487U JP 1325487 U JP1325487 U JP 1325487U JP S63121427 U JPS63121427 U JP S63121427U
Authority
JP
Japan
Prior art keywords
transmission member
shielding plate
substrate holder
growth chamber
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1325487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1325487U priority Critical patent/JPS63121427U/ja
Publication of JPS63121427U publication Critical patent/JPS63121427U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1325487U 1987-01-30 1987-01-30 Pending JPS63121427U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1325487U JPS63121427U (enExample) 1987-01-30 1987-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1325487U JPS63121427U (enExample) 1987-01-30 1987-01-30

Publications (1)

Publication Number Publication Date
JPS63121427U true JPS63121427U (enExample) 1988-08-05

Family

ID=30802140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1325487U Pending JPS63121427U (enExample) 1987-01-30 1987-01-30

Country Status (1)

Country Link
JP (1) JPS63121427U (enExample)

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