JPS6255340U - - Google Patents
Info
- Publication number
- JPS6255340U JPS6255340U JP14675185U JP14675185U JPS6255340U JP S6255340 U JPS6255340 U JP S6255340U JP 14675185 U JP14675185 U JP 14675185U JP 14675185 U JP14675185 U JP 14675185U JP S6255340 U JPS6255340 U JP S6255340U
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- substrate
- thin metal
- metal plate
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14675185U JPS6255340U (enExample) | 1985-09-26 | 1985-09-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14675185U JPS6255340U (enExample) | 1985-09-26 | 1985-09-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6255340U true JPS6255340U (enExample) | 1987-04-06 |
Family
ID=31059502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14675185U Pending JPS6255340U (enExample) | 1985-09-26 | 1985-09-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6255340U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4913793U (enExample) * | 1972-05-11 | 1974-02-05 |
-
1985
- 1985-09-26 JP JP14675185U patent/JPS6255340U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4913793U (enExample) * | 1972-05-11 | 1974-02-05 |