JPS4913793U - - Google Patents
Info
- Publication number
- JPS4913793U JPS4913793U JP5495072U JP5495072U JPS4913793U JP S4913793 U JPS4913793 U JP S4913793U JP 5495072 U JP5495072 U JP 5495072U JP 5495072 U JP5495072 U JP 5495072U JP S4913793 U JPS4913793 U JP S4913793U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5495072U JPS4913793U (enExample) | 1972-05-11 | 1972-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5495072U JPS4913793U (enExample) | 1972-05-11 | 1972-05-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4913793U true JPS4913793U (enExample) | 1974-02-05 |
Family
ID=27938707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5495072U Pending JPS4913793U (enExample) | 1972-05-11 | 1972-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4913793U (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61256622A (ja) * | 1985-05-08 | 1986-11-14 | Mitsubishi Electric Corp | 薄膜形成装置 |
| JPS6255340U (enExample) * | 1985-09-26 | 1987-04-06 | ||
| JPH07197241A (ja) * | 1993-12-29 | 1995-08-01 | Tokyo Tungsten Co Ltd | 真空蒸着装置用ヒータ |
-
1972
- 1972-05-11 JP JP5495072U patent/JPS4913793U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61256622A (ja) * | 1985-05-08 | 1986-11-14 | Mitsubishi Electric Corp | 薄膜形成装置 |
| JPS6255340U (enExample) * | 1985-09-26 | 1987-04-06 | ||
| JPH07197241A (ja) * | 1993-12-29 | 1995-08-01 | Tokyo Tungsten Co Ltd | 真空蒸着装置用ヒータ |