JPH01104636U - - Google Patents
Info
- Publication number
- JPH01104636U JPH01104636U JP1987201432U JP20143287U JPH01104636U JP H01104636 U JPH01104636 U JP H01104636U JP 1987201432 U JP1987201432 U JP 1987201432U JP 20143287 U JP20143287 U JP 20143287U JP H01104636 U JPH01104636 U JP H01104636U
- Authority
- JP
- Japan
- Prior art keywords
- base
- elastic body
- substrate
- presses
- holding device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987201432U JPH01104636U (enExample) | 1987-12-29 | 1987-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987201432U JPH01104636U (enExample) | 1987-12-29 | 1987-12-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01104636U true JPH01104636U (enExample) | 1989-07-14 |
Family
ID=31491791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987201432U Pending JPH01104636U (enExample) | 1987-12-29 | 1987-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01104636U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10177964A (ja) * | 1996-12-18 | 1998-06-30 | Shin Etsu Chem Co Ltd | イオン注入機用プラテン |
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1987
- 1987-12-29 JP JP1987201432U patent/JPH01104636U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10177964A (ja) * | 1996-12-18 | 1998-06-30 | Shin Etsu Chem Co Ltd | イオン注入機用プラテン |