JPS62157150U - - Google Patents

Info

Publication number
JPS62157150U
JPS62157150U JP4426086U JP4426086U JPS62157150U JP S62157150 U JPS62157150 U JP S62157150U JP 4426086 U JP4426086 U JP 4426086U JP 4426086 U JP4426086 U JP 4426086U JP S62157150 U JPS62157150 U JP S62157150U
Authority
JP
Japan
Prior art keywords
orientation flat
pulse
pulse motor
optical sensor
detection optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4426086U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0121563Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986044260U priority Critical patent/JPH0121563Y2/ja
Publication of JPS62157150U publication Critical patent/JPS62157150U/ja
Application granted granted Critical
Publication of JPH0121563Y2 publication Critical patent/JPH0121563Y2/ja
Expired legal-status Critical Current

Links

JP1986044260U 1986-03-26 1986-03-26 Expired JPH0121563Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986044260U JPH0121563Y2 (enExample) 1986-03-26 1986-03-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986044260U JPH0121563Y2 (enExample) 1986-03-26 1986-03-26

Publications (2)

Publication Number Publication Date
JPS62157150U true JPS62157150U (enExample) 1987-10-06
JPH0121563Y2 JPH0121563Y2 (enExample) 1989-06-27

Family

ID=30861899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986044260U Expired JPH0121563Y2 (enExample) 1986-03-26 1986-03-26

Country Status (1)

Country Link
JP (1) JPH0121563Y2 (enExample)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5539901A (en) * 1978-08-09 1980-03-21 Hitachi Denshi Ltd Integrating multiplication system of digital differential analyzer
JPS59181617A (ja) * 1983-03-28 1984-10-16 シリコン・バレイ・グル−プ・インコ−ポレイテツド ウエ−ハ操作方法及び装置
JPS61234544A (ja) * 1985-04-11 1986-10-18 Daiichi Seiki Kk ウエハ−の位置決め装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5539901A (en) * 1978-08-09 1980-03-21 Hitachi Denshi Ltd Integrating multiplication system of digital differential analyzer
JPS59181617A (ja) * 1983-03-28 1984-10-16 シリコン・バレイ・グル−プ・インコ−ポレイテツド ウエ−ハ操作方法及び装置
JPS61234544A (ja) * 1985-04-11 1986-10-18 Daiichi Seiki Kk ウエハ−の位置決め装置

Also Published As

Publication number Publication date
JPH0121563Y2 (enExample) 1989-06-27

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