JPS62153366U - - Google Patents

Info

Publication number
JPS62153366U
JPS62153366U JP3744786U JP3744786U JPS62153366U JP S62153366 U JPS62153366 U JP S62153366U JP 3744786 U JP3744786 U JP 3744786U JP 3744786 U JP3744786 U JP 3744786U JP S62153366 U JPS62153366 U JP S62153366U
Authority
JP
Japan
Prior art keywords
filter
plasma cvd
cvd apparatus
raw material
material gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3744786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3744786U priority Critical patent/JPS62153366U/ja
Publication of JPS62153366U publication Critical patent/JPS62153366U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP3744786U 1986-03-14 1986-03-14 Pending JPS62153366U (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3744786U JPS62153366U (cg-RX-API-DMAC7.html) 1986-03-14 1986-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3744786U JPS62153366U (cg-RX-API-DMAC7.html) 1986-03-14 1986-03-14

Publications (1)

Publication Number Publication Date
JPS62153366U true JPS62153366U (cg-RX-API-DMAC7.html) 1987-09-29

Family

ID=30848780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3744786U Pending JPS62153366U (cg-RX-API-DMAC7.html) 1986-03-14 1986-03-14

Country Status (1)

Country Link
JP (1) JPS62153366U (cg-RX-API-DMAC7.html)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59427B2 (ja) * 1978-04-21 1984-01-06 プルマン・インコ−ポレイテツド タンク車用堰排流装置
JPS6129849A (ja) * 1984-07-20 1986-02-10 Toshiba Corp 非晶質シリコン成膜装置
JPS6169967A (ja) * 1984-09-12 1986-04-10 Toshiba Corp 成膜装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59427B2 (ja) * 1978-04-21 1984-01-06 プルマン・インコ−ポレイテツド タンク車用堰排流装置
JPS6129849A (ja) * 1984-07-20 1986-02-10 Toshiba Corp 非晶質シリコン成膜装置
JPS6169967A (ja) * 1984-09-12 1986-04-10 Toshiba Corp 成膜装置

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