JPS62152123A - 気相成長装置 - Google Patents

気相成長装置

Info

Publication number
JPS62152123A
JPS62152123A JP60293773A JP29377385A JPS62152123A JP S62152123 A JPS62152123 A JP S62152123A JP 60293773 A JP60293773 A JP 60293773A JP 29377385 A JP29377385 A JP 29377385A JP S62152123 A JPS62152123 A JP S62152123A
Authority
JP
Japan
Prior art keywords
gas
reaction
reaction gas
phase growth
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60293773A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0545053B2 (enrdf_load_stackoverflow
Inventor
Masato Mitani
三谷　眞人
Takashi Ichiyanagi
一柳　高畤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60293773A priority Critical patent/JPS62152123A/ja
Publication of JPS62152123A publication Critical patent/JPS62152123A/ja
Publication of JPH0545053B2 publication Critical patent/JPH0545053B2/ja
Granted legal-status Critical Current

Links

JP60293773A 1985-12-26 1985-12-26 気相成長装置 Granted JPS62152123A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60293773A JPS62152123A (ja) 1985-12-26 1985-12-26 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60293773A JPS62152123A (ja) 1985-12-26 1985-12-26 気相成長装置

Publications (2)

Publication Number Publication Date
JPS62152123A true JPS62152123A (ja) 1987-07-07
JPH0545053B2 JPH0545053B2 (enrdf_load_stackoverflow) 1993-07-08

Family

ID=17799009

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60293773A Granted JPS62152123A (ja) 1985-12-26 1985-12-26 気相成長装置

Country Status (1)

Country Link
JP (1) JPS62152123A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4920918A (en) * 1989-04-18 1990-05-01 Applied Materials, Inc. Pressure-resistant thermal reactor system for semiconductor processing
JPH02136064U (enrdf_load_stackoverflow) * 1989-04-19 1990-11-13

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5678497A (en) * 1979-11-27 1981-06-27 Fujitsu Ltd Vapor growth apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5678497A (en) * 1979-11-27 1981-06-27 Fujitsu Ltd Vapor growth apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4920918A (en) * 1989-04-18 1990-05-01 Applied Materials, Inc. Pressure-resistant thermal reactor system for semiconductor processing
JPH02136064U (enrdf_load_stackoverflow) * 1989-04-19 1990-11-13

Also Published As

Publication number Publication date
JPH0545053B2 (enrdf_load_stackoverflow) 1993-07-08

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