JPS62151784A - 高精度移動テ−ブル装置 - Google Patents
高精度移動テ−ブル装置Info
- Publication number
- JPS62151784A JPS62151784A JP60291986A JP29198685A JPS62151784A JP S62151784 A JPS62151784 A JP S62151784A JP 60291986 A JP60291986 A JP 60291986A JP 29198685 A JP29198685 A JP 29198685A JP S62151784 A JPS62151784 A JP S62151784A
- Authority
- JP
- Japan
- Prior art keywords
- distance
- laser mirror
- distance variation
- prevention member
- moving table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002265 prevention Effects 0.000 claims description 22
- 238000005259 measurement Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 6
- 230000008602 contraction Effects 0.000 description 12
- 230000000694 effects Effects 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 238000000609 electron-beam lithography Methods 0.000 description 3
- 230000036316 preload Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Controlling Sheets Or Webs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60291986A JPS62151784A (ja) | 1985-12-26 | 1985-12-26 | 高精度移動テ−ブル装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60291986A JPS62151784A (ja) | 1985-12-26 | 1985-12-26 | 高精度移動テ−ブル装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62151784A true JPS62151784A (ja) | 1987-07-06 |
| JPH0562713B2 JPH0562713B2 (enrdf_load_stackoverflow) | 1993-09-09 |
Family
ID=17776033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60291986A Granted JPS62151784A (ja) | 1985-12-26 | 1985-12-26 | 高精度移動テ−ブル装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62151784A (enrdf_load_stackoverflow) |
-
1985
- 1985-12-26 JP JP60291986A patent/JPS62151784A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0562713B2 (enrdf_load_stackoverflow) | 1993-09-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| EXPY | Cancellation because of completion of term |