JPS62149868A - 強磁性体の高速スパツタリング方法 - Google Patents

強磁性体の高速スパツタリング方法

Info

Publication number
JPS62149868A
JPS62149868A JP28997085A JP28997085A JPS62149868A JP S62149868 A JPS62149868 A JP S62149868A JP 28997085 A JP28997085 A JP 28997085A JP 28997085 A JP28997085 A JP 28997085A JP S62149868 A JPS62149868 A JP S62149868A
Authority
JP
Japan
Prior art keywords
targets
poles
ferromagnetic material
target
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28997085A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0448871B2 (enExample
Inventor
Koichiro Okazaki
岡崎　幸一郎
Masaichi Otaka
尾高　政一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP28997085A priority Critical patent/JPS62149868A/ja
Publication of JPS62149868A publication Critical patent/JPS62149868A/ja
Publication of JPH0448871B2 publication Critical patent/JPH0448871B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP28997085A 1985-12-23 1985-12-23 強磁性体の高速スパツタリング方法 Granted JPS62149868A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28997085A JPS62149868A (ja) 1985-12-23 1985-12-23 強磁性体の高速スパツタリング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28997085A JPS62149868A (ja) 1985-12-23 1985-12-23 強磁性体の高速スパツタリング方法

Publications (2)

Publication Number Publication Date
JPS62149868A true JPS62149868A (ja) 1987-07-03
JPH0448871B2 JPH0448871B2 (enExample) 1992-08-07

Family

ID=17750081

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28997085A Granted JPS62149868A (ja) 1985-12-23 1985-12-23 強磁性体の高速スパツタリング方法

Country Status (1)

Country Link
JP (1) JPS62149868A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01104771A (ja) * 1987-10-14 1989-04-21 Anelva Corp 平板マグネトロンスパッタ装置
JPH03247761A (ja) * 1990-02-23 1991-11-05 Yoshihisa Nakamura スパッタターゲット装置
JPH0913169A (ja) * 1995-06-29 1997-01-14 Matsushita Electric Ind Co Ltd スパッタリング装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58130277A (ja) * 1982-01-27 1983-08-03 Clarion Co Ltd マグネトロンスパツタ装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58130277A (ja) * 1982-01-27 1983-08-03 Clarion Co Ltd マグネトロンスパツタ装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01104771A (ja) * 1987-10-14 1989-04-21 Anelva Corp 平板マグネトロンスパッタ装置
JPH03247761A (ja) * 1990-02-23 1991-11-05 Yoshihisa Nakamura スパッタターゲット装置
JPH0913169A (ja) * 1995-06-29 1997-01-14 Matsushita Electric Ind Co Ltd スパッタリング装置

Also Published As

Publication number Publication date
JPH0448871B2 (enExample) 1992-08-07

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term