JPS62147250A - クリ−ンル−ム - Google Patents

クリ−ンル−ム

Info

Publication number
JPS62147250A
JPS62147250A JP60287330A JP28733085A JPS62147250A JP S62147250 A JPS62147250 A JP S62147250A JP 60287330 A JP60287330 A JP 60287330A JP 28733085 A JP28733085 A JP 28733085A JP S62147250 A JPS62147250 A JP S62147250A
Authority
JP
Japan
Prior art keywords
area
air
air supply
clean
equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60287330A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0535327B2 (enrdf_load_stackoverflow
Inventor
Yoshinobu Suzuki
良延 鈴木
▲ま▼鍋　充房
Mitsufusa Manabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimizu Construction Co Ltd
Original Assignee
Shimizu Construction Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimizu Construction Co Ltd filed Critical Shimizu Construction Co Ltd
Priority to JP60287330A priority Critical patent/JPS62147250A/ja
Priority to EP86906948A priority patent/EP0250596B1/en
Priority to US07/057,525 priority patent/US4838150A/en
Priority to PCT/JP1986/000603 priority patent/WO1987003356A1/ja
Priority to DE8686906948T priority patent/DE3683492D1/de
Priority to CA000525873A priority patent/CA1280929C/en
Priority to KR870700365A priority patent/KR880700218A/ko
Publication of JPS62147250A publication Critical patent/JPS62147250A/ja
Publication of JPH0535327B2 publication Critical patent/JPH0535327B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
JP60287330A 1985-11-26 1985-12-20 クリ−ンル−ム Granted JPS62147250A (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP60287330A JPS62147250A (ja) 1985-12-20 1985-12-20 クリ−ンル−ム
EP86906948A EP0250596B1 (en) 1985-11-26 1986-11-26 Clean room
US07/057,525 US4838150A (en) 1985-11-26 1986-11-26 Clean room
PCT/JP1986/000603 WO1987003356A1 (en) 1985-11-26 1986-11-26 Clean room
DE8686906948T DE3683492D1 (de) 1985-11-26 1986-11-26 Reinraum.
CA000525873A CA1280929C (en) 1985-12-19 1986-12-19 Clean room
KR870700365A KR880700218A (ko) 1985-11-26 1987-04-27 크린 룸

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60287330A JPS62147250A (ja) 1985-12-20 1985-12-20 クリ−ンル−ム

Publications (2)

Publication Number Publication Date
JPS62147250A true JPS62147250A (ja) 1987-07-01
JPH0535327B2 JPH0535327B2 (enrdf_load_stackoverflow) 1993-05-26

Family

ID=17715965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60287330A Granted JPS62147250A (ja) 1985-11-26 1985-12-20 クリ−ンル−ム

Country Status (1)

Country Link
JP (1) JPS62147250A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0666439A (ja) * 1992-08-13 1994-03-08 Kawasaki Steel Corp クリーンルーム及びエアサプライユニット
KR100643252B1 (ko) 2004-05-26 2006-11-10 알프스 덴키 가부시키가이샤 클린유닛
JP2011242503A (ja) * 2010-05-17 2011-12-01 Shin Etsu Chem Co Ltd クリーンルーム内製品保管用ストッカー

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0666439A (ja) * 1992-08-13 1994-03-08 Kawasaki Steel Corp クリーンルーム及びエアサプライユニット
KR100643252B1 (ko) 2004-05-26 2006-11-10 알프스 덴키 가부시키가이샤 클린유닛
JP2011242503A (ja) * 2010-05-17 2011-12-01 Shin Etsu Chem Co Ltd クリーンルーム内製品保管用ストッカー

Also Published As

Publication number Publication date
JPH0535327B2 (enrdf_load_stackoverflow) 1993-05-26

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