JPS62147249A - クリ−ンル−ム - Google Patents

クリ−ンル−ム

Info

Publication number
JPS62147249A
JPS62147249A JP60286571A JP28657185A JPS62147249A JP S62147249 A JPS62147249 A JP S62147249A JP 60286571 A JP60286571 A JP 60286571A JP 28657185 A JP28657185 A JP 28657185A JP S62147249 A JPS62147249 A JP S62147249A
Authority
JP
Japan
Prior art keywords
area
equipment
air
clean
air supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60286571A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0535326B2 (enrdf_load_stackoverflow
Inventor
Yoshinobu Suzuki
良延 鈴木
Mitsufusa Manabe
真鍋　充房
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimizu Construction Co Ltd
Original Assignee
Shimizu Construction Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimizu Construction Co Ltd filed Critical Shimizu Construction Co Ltd
Priority to JP60286571A priority Critical patent/JPS62147249A/ja
Priority to DE8686906948T priority patent/DE3683492D1/de
Priority to PCT/JP1986/000603 priority patent/WO1987003356A1/ja
Priority to EP86906948A priority patent/EP0250596B1/en
Priority to US07/057,525 priority patent/US4838150A/en
Priority to CA000525873A priority patent/CA1280929C/en
Priority to KR870700365A priority patent/KR880700218A/ko
Publication of JPS62147249A publication Critical patent/JPS62147249A/ja
Publication of JPH0535326B2 publication Critical patent/JPH0535326B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
JP60286571A 1985-11-26 1985-12-19 クリ−ンル−ム Granted JPS62147249A (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP60286571A JPS62147249A (ja) 1985-12-19 1985-12-19 クリ−ンル−ム
DE8686906948T DE3683492D1 (de) 1985-11-26 1986-11-26 Reinraum.
PCT/JP1986/000603 WO1987003356A1 (en) 1985-11-26 1986-11-26 Clean room
EP86906948A EP0250596B1 (en) 1985-11-26 1986-11-26 Clean room
US07/057,525 US4838150A (en) 1985-11-26 1986-11-26 Clean room
CA000525873A CA1280929C (en) 1985-12-19 1986-12-19 Clean room
KR870700365A KR880700218A (ko) 1985-11-26 1987-04-27 크린 룸

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60286571A JPS62147249A (ja) 1985-12-19 1985-12-19 クリ−ンル−ム

Publications (2)

Publication Number Publication Date
JPS62147249A true JPS62147249A (ja) 1987-07-01
JPH0535326B2 JPH0535326B2 (enrdf_load_stackoverflow) 1993-05-26

Family

ID=17706131

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60286571A Granted JPS62147249A (ja) 1985-11-26 1985-12-19 クリ−ンル−ム

Country Status (1)

Country Link
JP (1) JPS62147249A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62201330U (enrdf_load_stackoverflow) * 1986-06-11 1987-12-22
US5549512A (en) * 1994-11-30 1996-08-27 Lucent Technologies Inc. Minienvironment for hazardous process tools
JPH0989329A (ja) * 1995-09-26 1997-04-04 Benitsukusu Kk クリーンルームの間仕切構造
JPH0989328A (ja) * 1995-09-26 1997-04-04 Benitsukusu Kk クリーンルームの間仕切構造
US6264550B1 (en) * 1997-07-11 2001-07-24 Nippon Steel Semiconductor Corporation Clean room and method of remodeling clean room
US6347990B1 (en) * 1999-04-03 2002-02-19 Samsung Electronics Co., Ltd. Microelectronic fabrication system cleaning methods and systems that maintain higher air pressure in a process area than in a transfer area

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62201330U (enrdf_load_stackoverflow) * 1986-06-11 1987-12-22
US5549512A (en) * 1994-11-30 1996-08-27 Lucent Technologies Inc. Minienvironment for hazardous process tools
JPH0989329A (ja) * 1995-09-26 1997-04-04 Benitsukusu Kk クリーンルームの間仕切構造
JPH0989328A (ja) * 1995-09-26 1997-04-04 Benitsukusu Kk クリーンルームの間仕切構造
US6264550B1 (en) * 1997-07-11 2001-07-24 Nippon Steel Semiconductor Corporation Clean room and method of remodeling clean room
US6347990B1 (en) * 1999-04-03 2002-02-19 Samsung Electronics Co., Ltd. Microelectronic fabrication system cleaning methods and systems that maintain higher air pressure in a process area than in a transfer area

Also Published As

Publication number Publication date
JPH0535326B2 (enrdf_load_stackoverflow) 1993-05-26

Similar Documents

Publication Publication Date Title
EP0250596B1 (en) Clean room
RU2074293C1 (ru) Модуль для конструкции потолка в помещениях стерильной чистоты
US3252400A (en) Means providing a coordinated air flow in an enclosure
JP7065264B2 (ja) 熱交換形換気装置
JP6767616B2 (ja) 送風装置
JPS62147249A (ja) クリ−ンル−ム
JP2551923Y2 (ja) クリーンルーム
JPS62182541A (ja) クリ−ンル−ム
JPS62147250A (ja) クリ−ンル−ム
JP2001153414A (ja) 循環型クリーンルーム
JP2536188B2 (ja) 空気清浄装置
JPH0611064Y2 (ja) クリーンルーム用ファンフィルタユニット
JP2673799B2 (ja) 空気清浄機とパーティションを用いた空調ルーム
JP2020076563A (ja) ユニット型クリーンルーム及びユニット型クリーンルーム施設方法
JPH019669Y2 (enrdf_load_stackoverflow)
JPH068695B2 (ja) クリ−ンル−ム
JP3420722B2 (ja) 局所空気清浄装置
JP6851456B1 (ja) クリーンルーム
JP3820609B2 (ja) トンネル式のクリーンルームのフィルタダクト形成方法
JPH0340334Y2 (enrdf_load_stackoverflow)
JPH0724817B2 (ja) エア−シヤワ−装置
JPH01281350A (ja) クリーンルーム
JPH0515933B2 (enrdf_load_stackoverflow)
CA1280929C (en) Clean room
JPH019668Y2 (enrdf_load_stackoverflow)