JPS6214692Y2 - - Google Patents
Info
- Publication number
- JPS6214692Y2 JPS6214692Y2 JP1982034901U JP3490182U JPS6214692Y2 JP S6214692 Y2 JPS6214692 Y2 JP S6214692Y2 JP 1982034901 U JP1982034901 U JP 1982034901U JP 3490182 U JP3490182 U JP 3490182U JP S6214692 Y2 JPS6214692 Y2 JP S6214692Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- feed
- center line
- drive pin
- flat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 description 25
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3490182U JPS58138339U (ja) | 1982-03-12 | 1982-03-12 | ウエハ−の位置決め装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3490182U JPS58138339U (ja) | 1982-03-12 | 1982-03-12 | ウエハ−の位置決め装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58138339U JPS58138339U (ja) | 1983-09-17 |
JPS6214692Y2 true JPS6214692Y2 (US06368395-20020409-C00050.png) | 1987-04-15 |
Family
ID=30046394
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3490182U Granted JPS58138339U (ja) | 1982-03-12 | 1982-03-12 | ウエハ−の位置決め装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58138339U (US06368395-20020409-C00050.png) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5392667A (en) * | 1977-01-25 | 1978-08-14 | Tokyo Seimitsu Co Ltd | Device for positioning wafer |
-
1982
- 1982-03-12 JP JP3490182U patent/JPS58138339U/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5392667A (en) * | 1977-01-25 | 1978-08-14 | Tokyo Seimitsu Co Ltd | Device for positioning wafer |
Also Published As
Publication number | Publication date |
---|---|
JPS58138339U (ja) | 1983-09-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4441853A (en) | Disc orienting device | |
JPH0573346B2 (US06368395-20020409-C00050.png) | ||
JPS6214692Y2 (US06368395-20020409-C00050.png) | ||
JPH0334216B2 (US06368395-20020409-C00050.png) | ||
JPH0528772Y2 (US06368395-20020409-C00050.png) | ||
JP3072484B2 (ja) | ウエハ位置決め装置 | |
JPS59228720A (ja) | 整合装置 | |
JP2803702B2 (ja) | ウエハ姿勢制御装置 | |
JP3542815B2 (ja) | ウェハーノッチ部の鏡面研磨装置およびその鏡面研磨方法 | |
JP2002273689A (ja) | シート切断装置 | |
JPH073633Y2 (ja) | ダイシングテープカット装置 | |
JPS6057641A (ja) | 半導体ウエハ用フアセツトアライナ | |
JPS61201438A (ja) | プリアライメントロ−ラ駆動装置 | |
JPH03148154A (ja) | ウエハ位置決め装置 | |
JPS62113440A (ja) | 吸着ノズルの回り留め装置 | |
JPS58171831A (ja) | ウエハのオリエンテ−シヨンフラツト合せ装置 | |
JPH04364729A (ja) | ウエーハのノッチ部面取り装置 | |
KR19980022663U (ko) | 웨이퍼 정렬장치 | |
JP3478682B2 (ja) | ノッチ付きウェーハ整列装置 | |
JPS6262537A (ja) | 半導体製造装置のオリエンテ−シヨンフラツト位置決め装置 | |
JPS61201439A (ja) | プリアライメント装置 | |
JPH02121347A (ja) | ウエハの位置決め装置 | |
JPH0337916Y2 (US06368395-20020409-C00050.png) | ||
KR960001732Y1 (ko) | 전자부품 예비정렬 장치 | |
JPS6130285Y2 (US06368395-20020409-C00050.png) |