JPS62144020A - 容量式変位変換装置 - Google Patents

容量式変位変換装置

Info

Publication number
JPS62144020A
JPS62144020A JP28529185A JP28529185A JPS62144020A JP S62144020 A JPS62144020 A JP S62144020A JP 28529185 A JP28529185 A JP 28529185A JP 28529185 A JP28529185 A JP 28529185A JP S62144020 A JPS62144020 A JP S62144020A
Authority
JP
Japan
Prior art keywords
signal
displacement
static pressure
sensor
capacitance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28529185A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0431327B2 (enExample
Inventor
Terutaka Hirata
平田　輝孝
Atsushi Kimura
木村　惇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP28529185A priority Critical patent/JPS62144020A/ja
Publication of JPS62144020A publication Critical patent/JPS62144020A/ja
Publication of JPH0431327B2 publication Critical patent/JPH0431327B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP28529185A 1985-12-18 1985-12-18 容量式変位変換装置 Granted JPS62144020A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28529185A JPS62144020A (ja) 1985-12-18 1985-12-18 容量式変位変換装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28529185A JPS62144020A (ja) 1985-12-18 1985-12-18 容量式変位変換装置

Publications (2)

Publication Number Publication Date
JPS62144020A true JPS62144020A (ja) 1987-06-27
JPH0431327B2 JPH0431327B2 (enExample) 1992-05-26

Family

ID=17689617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28529185A Granted JPS62144020A (ja) 1985-12-18 1985-12-18 容量式変位変換装置

Country Status (1)

Country Link
JP (1) JPS62144020A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009257880A (ja) * 2008-04-15 2009-11-05 Ihi Corp 油膜厚さ計測装置および方法
JP2011191223A (ja) * 2010-03-16 2011-09-29 Mitsutoyo Corp 容量変化型変位計

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009257880A (ja) * 2008-04-15 2009-11-05 Ihi Corp 油膜厚さ計測装置および方法
JP2011191223A (ja) * 2010-03-16 2011-09-29 Mitsutoyo Corp 容量変化型変位計

Also Published As

Publication number Publication date
JPH0431327B2 (enExample) 1992-05-26

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