JPS62144013A - 光電式位置検出装置 - Google Patents
光電式位置検出装置Info
- Publication number
- JPS62144013A JPS62144013A JP28460785A JP28460785A JPS62144013A JP S62144013 A JPS62144013 A JP S62144013A JP 28460785 A JP28460785 A JP 28460785A JP 28460785 A JP28460785 A JP 28460785A JP S62144013 A JPS62144013 A JP S62144013A
- Authority
- JP
- Japan
- Prior art keywords
- photoelectric
- position detection
- measured
- detection device
- light beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 claims abstract description 25
- 238000006073 displacement reaction Methods 0.000 claims abstract description 11
- 238000012937 correction Methods 0.000 claims abstract description 4
- 238000001514 detection method Methods 0.000 claims description 37
- 238000000034 method Methods 0.000 claims description 15
- 230000003287 optical effect Effects 0.000 claims description 11
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 238000009826 distribution Methods 0.000 description 8
- 230000003746 surface roughness Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Landscapes
- Automatic Focus Adjustment (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28460785A JPS62144013A (ja) | 1985-12-18 | 1985-12-18 | 光電式位置検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28460785A JPS62144013A (ja) | 1985-12-18 | 1985-12-18 | 光電式位置検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62144013A true JPS62144013A (ja) | 1987-06-27 |
| JPH0224446B2 JPH0224446B2 (enrdf_load_stackoverflow) | 1990-05-29 |
Family
ID=17680645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28460785A Granted JPS62144013A (ja) | 1985-12-18 | 1985-12-18 | 光電式位置検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62144013A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008505696A (ja) * | 2004-07-09 | 2008-02-28 | ヴィスクス インコーポレイテッド | 走査レーザー眼手術装置用のレーザーパルス位置モニター |
-
1985
- 1985-12-18 JP JP28460785A patent/JPS62144013A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008505696A (ja) * | 2004-07-09 | 2008-02-28 | ヴィスクス インコーポレイテッド | 走査レーザー眼手術装置用のレーザーパルス位置モニター |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0224446B2 (enrdf_load_stackoverflow) | 1990-05-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4897536A (en) | Optical axis displacement sensor with cylindrical lens means | |
| JPH0374763B2 (enrdf_load_stackoverflow) | ||
| JPS5999304A (ja) | 顕微鏡系のレーザ光による比較測長装置 | |
| US4730927A (en) | Method and apparatus for measuring positions on the surface of a flat object | |
| CN110132374A (zh) | 一种自补偿式激光液位测量系统 | |
| JPS6324115A (ja) | 磁気ヘツドの浮上量測定方法及びその装置 | |
| US7804605B2 (en) | Optical multi-axis linear displacement measurement system and a method thereof | |
| JPS62144014A (ja) | 光電式位置検出装置 | |
| JPS62144013A (ja) | 光電式位置検出装置 | |
| US20200292300A1 (en) | Non-contact sheet material thickness measurement system | |
| JPH08304068A (ja) | 距離計測装置及びその方法 | |
| JPS61191908A (ja) | 形状測定方法 | |
| JPH07332954A (ja) | 変位傾斜測定方法および装置 | |
| JPH0318887Y2 (enrdf_load_stackoverflow) | ||
| JPH06258040A (ja) | レーザー変位計 | |
| JPS5826325Y2 (ja) | 位置検出装置 | |
| TWI239385B (en) | A kind of apparatus using transmission grating to measure rotation axis errors | |
| JPS635208A (ja) | 表面形状測定装置 | |
| JPS62138715A (ja) | 変位の測定方法および装置 | |
| JPS6262208A (ja) | 距離測定装置および距離測定方法 | |
| JPH0359413A (ja) | 位置測定装置 | |
| JPS63196807A (ja) | 光学式変位計測方法 | |
| JPS5836032Y2 (ja) | レベル検出装置 | |
| JPH0331367B2 (enrdf_load_stackoverflow) | ||
| JP2529049B2 (ja) | 光学式変位計 |