JPS62142842U - - Google Patents

Info

Publication number
JPS62142842U
JPS62142842U JP1986030357U JP3035786U JPS62142842U JP S62142842 U JPS62142842 U JP S62142842U JP 1986030357 U JP1986030357 U JP 1986030357U JP 3035786 U JP3035786 U JP 3035786U JP S62142842 U JPS62142842 U JP S62142842U
Authority
JP
Japan
Prior art keywords
resist
cup
semiconductor wafers
solvent
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986030357U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986030357U priority Critical patent/JPS62142842U/ja
Publication of JPS62142842U publication Critical patent/JPS62142842U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1986030357U 1986-03-03 1986-03-03 Pending JPS62142842U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986030357U JPS62142842U (enExample) 1986-03-03 1986-03-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986030357U JPS62142842U (enExample) 1986-03-03 1986-03-03

Publications (1)

Publication Number Publication Date
JPS62142842U true JPS62142842U (enExample) 1987-09-09

Family

ID=30835085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986030357U Pending JPS62142842U (enExample) 1986-03-03 1986-03-03

Country Status (1)

Country Link
JP (1) JPS62142842U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02227162A (ja) * 1989-02-28 1990-09-10 Tokyo Electron Ltd 塗布装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02227162A (ja) * 1989-02-28 1990-09-10 Tokyo Electron Ltd 塗布装置

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