JPS62135434U - - Google Patents
Info
- Publication number
- JPS62135434U JPS62135434U JP2352486U JP2352486U JPS62135434U JP S62135434 U JPS62135434 U JP S62135434U JP 2352486 U JP2352486 U JP 2352486U JP 2352486 U JP2352486 U JP 2352486U JP S62135434 U JPS62135434 U JP S62135434U
- Authority
- JP
- Japan
- Prior art keywords
- magnesia film
- reacting
- reaction tube
- magnesium compound
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 claims 8
- 239000000395 magnesium oxide Substances 0.000 claims 4
- 150000002681 magnesium compounds Chemical class 0.000 claims 2
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2352486U JPS62135434U (enrdf_load_html_response) | 1986-02-20 | 1986-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2352486U JPS62135434U (enrdf_load_html_response) | 1986-02-20 | 1986-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62135434U true JPS62135434U (enrdf_load_html_response) | 1987-08-26 |
Family
ID=30821904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2352486U Pending JPS62135434U (enrdf_load_html_response) | 1986-02-20 | 1986-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62135434U (enrdf_load_html_response) |
-
1986
- 1986-02-20 JP JP2352486U patent/JPS62135434U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS62135434U (enrdf_load_html_response) | ||
| JPS59103772U (ja) | 薄膜気相成長装置 | |
| JPS59103770U (ja) | 薄膜気相成長装置 | |
| JPS59169370U (ja) | 液相エピタキシヤル膜成長用基板ホルダ | |
| JPS5853234U (ja) | 気相成長装置 | |
| JPS6319565U (enrdf_load_html_response) | ||
| JPS596836U (ja) | 薄膜気相成長装置 | |
| JPS6457636U (enrdf_load_html_response) | ||
| JPH01102161U (enrdf_load_html_response) | ||
| JPS6255576U (enrdf_load_html_response) | ||
| JPH0351834U (enrdf_load_html_response) | ||
| JPS6035536U (ja) | 減圧式気相成長装置 | |
| JPS6057125U (ja) | 半導体気相成長装置 | |
| JPS60185331U (ja) | 気相成長装置 | |
| JPS59117139U (ja) | 半導体製造装置 | |
| JPH03120030U (enrdf_load_html_response) | ||
| JPH01114680U (enrdf_load_html_response) | ||
| JPS6382929U (enrdf_load_html_response) | ||
| JPS6139937U (ja) | 拡散炉型気相成長装置 | |
| JPS6186924U (enrdf_load_html_response) | ||
| JPH01125368U (enrdf_load_html_response) | ||
| JPS58168575U (ja) | 有機金属気相成長装置 | |
| JPS59109777U (ja) | 原料ガス供給装置 | |
| JPH01142517U (enrdf_load_html_response) | ||
| JPS61177440U (enrdf_load_html_response) |