JPS6213355Y2 - - Google Patents

Info

Publication number
JPS6213355Y2
JPS6213355Y2 JP1981066970U JP6697081U JPS6213355Y2 JP S6213355 Y2 JPS6213355 Y2 JP S6213355Y2 JP 1981066970 U JP1981066970 U JP 1981066970U JP 6697081 U JP6697081 U JP 6697081U JP S6213355 Y2 JPS6213355 Y2 JP S6213355Y2
Authority
JP
Japan
Prior art keywords
waveguide
incinerator
branch
microwave
outer cylinder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981066970U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57178702U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981066970U priority Critical patent/JPS6213355Y2/ja
Publication of JPS57178702U publication Critical patent/JPS57178702U/ja
Application granted granted Critical
Publication of JPS6213355Y2 publication Critical patent/JPS6213355Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Waveguide Switches, Polarizers, And Phase Shifters (AREA)
  • Constitution Of High-Frequency Heating (AREA)
JP1981066970U 1981-05-09 1981-05-09 Expired JPS6213355Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981066970U JPS6213355Y2 (enExample) 1981-05-09 1981-05-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981066970U JPS6213355Y2 (enExample) 1981-05-09 1981-05-09

Publications (2)

Publication Number Publication Date
JPS57178702U JPS57178702U (enExample) 1982-11-12
JPS6213355Y2 true JPS6213355Y2 (enExample) 1987-04-06

Family

ID=29862992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981066970U Expired JPS6213355Y2 (enExample) 1981-05-09 1981-05-09

Country Status (1)

Country Link
JP (1) JPS6213355Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015079677A (ja) * 2013-10-17 2015-04-23 東京エレクトロン株式会社 マイクロ波プラズマ処理装置及びマイクロ波供給方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5249752A (en) * 1975-10-17 1977-04-21 Matsushita Electric Ind Co Ltd Electric wave switching guidewave

Also Published As

Publication number Publication date
JPS57178702U (enExample) 1982-11-12

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