JPS62126362U - - Google Patents

Info

Publication number
JPS62126362U
JPS62126362U JP16943986U JP16943986U JPS62126362U JP S62126362 U JPS62126362 U JP S62126362U JP 16943986 U JP16943986 U JP 16943986U JP 16943986 U JP16943986 U JP 16943986U JP S62126362 U JPS62126362 U JP S62126362U
Authority
JP
Japan
Prior art keywords
support stand
workpiece
gas
chamber
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16943986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0111721Y2 (nl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986169439U priority Critical patent/JPH0111721Y2/ja
Publication of JPS62126362U publication Critical patent/JPS62126362U/ja
Application granted granted Critical
Publication of JPH0111721Y2 publication Critical patent/JPH0111721Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1986169439U 1986-11-04 1986-11-04 Expired JPH0111721Y2 (nl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986169439U JPH0111721Y2 (nl) 1986-11-04 1986-11-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986169439U JPH0111721Y2 (nl) 1986-11-04 1986-11-04

Publications (2)

Publication Number Publication Date
JPS62126362U true JPS62126362U (nl) 1987-08-11
JPH0111721Y2 JPH0111721Y2 (nl) 1989-04-06

Family

ID=31103250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986169439U Expired JPH0111721Y2 (nl) 1986-11-04 1986-11-04

Country Status (1)

Country Link
JP (1) JPH0111721Y2 (nl)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006274390A (ja) * 2005-03-30 2006-10-12 Yamaguchi Prefecture ＳｉＮｘＯｙＣｚ膜及び薄膜の成膜方法
JP2012152732A (ja) * 2011-01-26 2012-08-16 秉豊 ▲頼▼ プラズマ反応方法及びプラズマ反応装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53144891A (en) * 1977-05-25 1978-12-16 Nippon Telegr & Teleph Corp <Ntt> Method and apparatus for production of inorganic compound
JPS5488016U (nl) * 1977-11-30 1979-06-21

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53144891A (en) * 1977-05-25 1978-12-16 Nippon Telegr & Teleph Corp <Ntt> Method and apparatus for production of inorganic compound
JPS5488016U (nl) * 1977-11-30 1979-06-21

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006274390A (ja) * 2005-03-30 2006-10-12 Yamaguchi Prefecture ＳｉＮｘＯｙＣｚ膜及び薄膜の成膜方法
JP2012152732A (ja) * 2011-01-26 2012-08-16 秉豊 ▲頼▼ プラズマ反応方法及びプラズマ反応装置

Also Published As

Publication number Publication date
JPH0111721Y2 (nl) 1989-04-06

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