JPS6273542U - - Google Patents
Info
- Publication number
- JPS6273542U JPS6273542U JP16534085U JP16534085U JPS6273542U JP S6273542 U JPS6273542 U JP S6273542U JP 16534085 U JP16534085 U JP 16534085U JP 16534085 U JP16534085 U JP 16534085U JP S6273542 U JPS6273542 U JP S6273542U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- wafers
- disk
- gas
- disc
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001020 plasma etching Methods 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000000034 method Methods 0.000 claims 2
- 239000000376 reactant Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16534085U JPS6273542U (nl) | 1985-10-28 | 1985-10-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16534085U JPS6273542U (nl) | 1985-10-28 | 1985-10-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6273542U true JPS6273542U (nl) | 1987-05-11 |
Family
ID=31095292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16534085U Pending JPS6273542U (nl) | 1985-10-28 | 1985-10-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6273542U (nl) |
-
1985
- 1985-10-28 JP JP16534085U patent/JPS6273542U/ja active Pending
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