JPS6230337U - - Google Patents
Info
- Publication number
- JPS6230337U JPS6230337U JP12096785U JP12096785U JPS6230337U JP S6230337 U JPS6230337 U JP S6230337U JP 12096785 U JP12096785 U JP 12096785U JP 12096785 U JP12096785 U JP 12096785U JP S6230337 U JPS6230337 U JP S6230337U
- Authority
- JP
- Japan
- Prior art keywords
- plasma processing
- gas supply
- chamber
- section
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 230000010355 oscillation Effects 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12096785U JPS6230337U (nl) | 1985-08-07 | 1985-08-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12096785U JPS6230337U (nl) | 1985-08-07 | 1985-08-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6230337U true JPS6230337U (nl) | 1987-02-24 |
Family
ID=31009786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12096785U Pending JPS6230337U (nl) | 1985-08-07 | 1985-08-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6230337U (nl) |
-
1985
- 1985-08-07 JP JP12096785U patent/JPS6230337U/ja active Pending
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