JPS6212601B2 - - Google Patents
Info
- Publication number
- JPS6212601B2 JPS6212601B2 JP7065479A JP7065479A JPS6212601B2 JP S6212601 B2 JPS6212601 B2 JP S6212601B2 JP 7065479 A JP7065479 A JP 7065479A JP 7065479 A JP7065479 A JP 7065479A JP S6212601 B2 JPS6212601 B2 JP S6212601B2
- Authority
- JP
- Japan
- Prior art keywords
- mesh
- insulating material
- dielectric
- irradiated
- conductive mesh
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011810 insulating material Substances 0.000 claims description 26
- 239000002904 solvent Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 16
- 239000000126 substance Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 8
- JTPNRXUCIXHOKM-UHFFFAOYSA-N 1-chloronaphthalene Chemical compound C1=CC=C2C(Cl)=CC=CC2=C1 JTPNRXUCIXHOKM-UHFFFAOYSA-N 0.000 claims description 4
- 229920000052 poly(p-xylylene) Polymers 0.000 claims description 4
- 239000000758 substrate Substances 0.000 description 9
- 238000007796 conventional method Methods 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 4
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 125000005397 methacrylic acid ester group Chemical group 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
Landscapes
- Inorganic Insulating Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7065479A JPS55163703A (en) | 1979-06-07 | 1979-06-07 | Method of manufacturing dielectric mesh |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7065479A JPS55163703A (en) | 1979-06-07 | 1979-06-07 | Method of manufacturing dielectric mesh |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55163703A JPS55163703A (en) | 1980-12-20 |
| JPS6212601B2 true JPS6212601B2 (enrdf_load_stackoverflow) | 1987-03-19 |
Family
ID=13437848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7065479A Granted JPS55163703A (en) | 1979-06-07 | 1979-06-07 | Method of manufacturing dielectric mesh |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55163703A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0667416U (ja) * | 1993-03-05 | 1994-09-22 | 株式会社ジュニアー | ハンガー商品の情報処理装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201432380A (zh) * | 2013-02-06 | 2014-08-16 | Univ Nat Taiwan | 形成光阻結構之方法 |
-
1979
- 1979-06-07 JP JP7065479A patent/JPS55163703A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0667416U (ja) * | 1993-03-05 | 1994-09-22 | 株式会社ジュニアー | ハンガー商品の情報処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55163703A (en) | 1980-12-20 |
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