JPS62124276A - フツ素ド−プ酸化スズコ−テイングを生ずる改良化学蒸着法 - Google Patents

フツ素ド−プ酸化スズコ−テイングを生ずる改良化学蒸着法

Info

Publication number
JPS62124276A
JPS62124276A JP60299697A JP29969785A JPS62124276A JP S62124276 A JPS62124276 A JP S62124276A JP 60299697 A JP60299697 A JP 60299697A JP 29969785 A JP29969785 A JP 29969785A JP S62124276 A JPS62124276 A JP S62124276A
Authority
JP
Japan
Prior art keywords
carrier gas
trichloride
weight
fluorine
dopant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60299697A
Other languages
English (en)
Japanese (ja)
Other versions
JPH036993B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
ゲオルグ　ハー　リンドネル
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
M&T Chemicals Inc
Original Assignee
M&T Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=24758907&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JPS62124276(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by M&T Chemicals Inc filed Critical M&T Chemicals Inc
Publication of JPS62124276A publication Critical patent/JPS62124276A/ja
Publication of JPH036993B2 publication Critical patent/JPH036993B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23—Oxides
    • C03C17/245—Oxides by deposition from the vapour phase
    • C03C17/2453—Coating containing SnO2
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/407—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Surface Treatment Of Glass (AREA)
  • Chemical Vapour Deposition (AREA)
JP60299697A 1984-12-28 1985-12-26 フツ素ド−プ酸化スズコ−テイングを生ずる改良化学蒸着法 Granted JPS62124276A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US06/687,067 US4590096A (en) 1984-12-28 1984-12-28 Water vapor, reaction rate and deposition rate control of tin oxide film by CVD on glass
US687067 1984-12-28
US748648 1985-06-25

Publications (2)

Publication Number Publication Date
JPS62124276A true JPS62124276A (ja) 1987-06-05
JPH036993B2 JPH036993B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-01-31

Family

ID=24758907

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60299697A Granted JPS62124276A (ja) 1984-12-28 1985-12-26 フツ素ド−プ酸化スズコ−テイングを生ずる改良化学蒸着法

Country Status (4)

Country Link
US (1) US4590096A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS62124276A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
KR (1) KR930004071B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
ZA (1) ZA859527B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100666521B1 (ko) * 1998-07-10 2007-01-11 메리엔느, 질르 산화 주석 필름 제조용 액상 코팅 조성물 및 이를 이용한 산화 주석 필름의 제조 방법
JP2008069071A (ja) * 1995-07-25 2008-03-27 Pilkington Group Ltd ガラスをコーティングする方法
KR101352922B1 (ko) * 2009-03-31 2014-01-17 피피지 인더스트리즈 오하이오 인코포레이티드 모노부틸틴 트리클로라이드의 회수
JP2018535905A (ja) * 2015-09-09 2018-12-06 ピルキントン グループ リミテッド 堆積法

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4696837A (en) * 1985-06-25 1987-09-29 M&T Chemicals Inc. Chemical vapor deposition method of producing fluorine-doped tin oxide coatings
BR8606673A (pt) * 1985-05-14 1987-08-11 M & T Chemicals Inc Processo para produzir revestimentos de oxido de estanho transparentes;livres de turvacao
US4776870A (en) * 1985-08-05 1988-10-11 Ford Motor Company Method for improving emmissivity value of a pyrolytically applied film
GB8630791D0 (en) * 1986-12-23 1987-02-04 Glaverbel Coating glass
US4857095A (en) * 1987-08-10 1989-08-15 Ford Motor Company Method for forming a fluorine-doped tin oxide coating on a glass substrate
US5004490A (en) * 1987-08-10 1991-04-02 Ford Motor Company Method of making glass substrate coated with tin oxide
US5108983A (en) * 1989-11-21 1992-04-28 Georgia Tech Research Corporation Method for the rapid deposition with low vapor pressure reactants by chemical vapor deposition
US5124180A (en) * 1991-03-11 1992-06-23 Btu Engineering Corporation Method for the formation of fluorine doped metal oxide films
US5393563A (en) * 1991-10-29 1995-02-28 Ellis, Jr.; Frank B. Formation of tin oxide films on glass substrates
EP0573640A4 (en) * 1991-12-26 1995-01-04 Atochem North America Elf COATED GLASS ARTICLE.
US5356718A (en) * 1993-02-16 1994-10-18 Ppg Industries, Inc. Coating apparatus, method of coating glass, compounds and compositions for coating glasss and coated glass substrates
US5863337A (en) * 1993-02-16 1999-01-26 Ppg Industries, Inc. Apparatus for coating a moving glass substrate
US5599387A (en) * 1993-02-16 1997-02-04 Ppg Industries, Inc. Compounds and compositions for coating glass with silicon oxide
US5496583A (en) * 1994-08-29 1996-03-05 Amoco/Enron Solar Hydrogen fluoride dopant source in the preparation of conductive coated substrate
US5725904A (en) * 1995-06-02 1998-03-10 Elf Atochem North America, Inc. Liquid methyltin halide compositions
DE19526100C1 (de) * 1995-07-18 1996-07-18 Goldschmidt Ag Th Stabilisiertes Monobutylzinntrichlorid
US5536308A (en) * 1995-07-21 1996-07-16 Quattlebaum, Jr.; William M. Compositions and methods for glass coating formation
US5698262A (en) * 1996-05-06 1997-12-16 Libbey-Owens-Ford Co. Method for forming tin oxide coating on glass
GB9616983D0 (en) 1996-08-13 1996-09-25 Pilkington Plc Method for depositing tin oxide and titanium oxide coatings on flat glass and the resulting coated glass
US6596398B1 (en) 1998-08-21 2003-07-22 Atofina Chemicals, Inc. Solar control coated glass
JP4272534B2 (ja) * 2002-01-28 2009-06-03 日本板硝子株式会社 透明導電膜を備えたガラス基板の製造方法、透明導電膜を備えたガラス基板、およびそれを用いた光電変換装置
US20050196623A1 (en) * 2004-03-03 2005-09-08 Mckown Clem S.Jr. Solar control coated glass composition
US8734903B2 (en) 2011-09-19 2014-05-27 Pilkington Group Limited Process for forming a silica coating on a glass substrate
CN102603206A (zh) * 2012-03-21 2012-07-25 浙江大学 一种多层氧化锡掺氟镀膜玻璃及其制备方法
US20130334089A1 (en) * 2012-06-15 2013-12-19 Michael P. Remington, Jr. Glass Container Insulative Coating

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4265974A (en) * 1976-11-01 1981-05-05 Gordon Roy G Electrically conductive, infrared reflective, transparent coatings of stannic oxide
US4293594A (en) * 1980-08-22 1981-10-06 Westinghouse Electric Corp. Method for forming conductive, transparent coating on a substrate

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008069071A (ja) * 1995-07-25 2008-03-27 Pilkington Group Ltd ガラスをコーティングする方法
KR100666521B1 (ko) * 1998-07-10 2007-01-11 메리엔느, 질르 산화 주석 필름 제조용 액상 코팅 조성물 및 이를 이용한 산화 주석 필름의 제조 방법
KR101352922B1 (ko) * 2009-03-31 2014-01-17 피피지 인더스트리즈 오하이오 인코포레이티드 모노부틸틴 트리클로라이드의 회수
JP2018535905A (ja) * 2015-09-09 2018-12-06 ピルキントン グループ リミテッド 堆積法

Also Published As

Publication number Publication date
KR860005048A (ko) 1986-07-16
KR930004071B1 (ko) 1993-05-20
US4590096A (en) 1986-05-20
JPH036993B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-01-31
ZA859527B (en) 1986-08-27

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