JPS62123776A - 赤外線検出素子 - Google Patents
赤外線検出素子Info
- Publication number
- JPS62123776A JPS62123776A JP60264344A JP26434485A JPS62123776A JP S62123776 A JPS62123776 A JP S62123776A JP 60264344 A JP60264344 A JP 60264344A JP 26434485 A JP26434485 A JP 26434485A JP S62123776 A JPS62123776 A JP S62123776A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- aluminum nitride
- adhesive
- infrared
- infrared sensitive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 32
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims abstract description 16
- 238000001514 detection method Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims 1
- 239000000853 adhesive Substances 0.000 abstract description 11
- 230000001070 adhesive effect Effects 0.000 abstract description 11
- 230000003746 surface roughness Effects 0.000 abstract description 8
- 238000005530 etching Methods 0.000 abstract description 3
- 239000002245 particle Substances 0.000 abstract description 2
- 229910052594 sapphire Inorganic materials 0.000 description 10
- 239000010980 sapphire Substances 0.000 description 10
- 239000013078 crystal Substances 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 230000002950 deficient Effects 0.000 description 4
- 229910000661 Mercury cadmium telluride Inorganic materials 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- MCMSPRNYOJJPIZ-UHFFFAOYSA-N cadmium;mercury;tellurium Chemical compound [Cd]=[Te]=[Hg] MCMSPRNYOJJPIZ-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 description 1
- 229940056932 lead sulfide Drugs 0.000 description 1
- 229910052981 lead sulfide Inorganic materials 0.000 description 1
- LQBJWKCYZGMFEV-UHFFFAOYSA-N lead tin Chemical compound [Sn].[Pb] LQBJWKCYZGMFEV-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Light Receiving Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60264344A JPS62123776A (ja) | 1985-11-22 | 1985-11-22 | 赤外線検出素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60264344A JPS62123776A (ja) | 1985-11-22 | 1985-11-22 | 赤外線検出素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62123776A true JPS62123776A (ja) | 1987-06-05 |
| JPH0476514B2 JPH0476514B2 (enExample) | 1992-12-03 |
Family
ID=17401856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60264344A Granted JPS62123776A (ja) | 1985-11-22 | 1985-11-22 | 赤外線検出素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62123776A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05149783A (ja) * | 1990-12-03 | 1993-06-15 | Santa Barbara Res Center | 赤外線検出器ジユワーパツケージで使用する急速冷却／低歪みハイブリツド焦点平面アレイプラツトフオーム |
| JP2022501885A (ja) * | 2018-09-20 | 2022-01-06 | インターナショナル・ビジネス・マシーンズ・コーポレーションInternational Business Machines Corporation | カピッツァ抵抗を低減させたｄｃ対応型極低温マイクロ波フィルタ |
-
1985
- 1985-11-22 JP JP60264344A patent/JPS62123776A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05149783A (ja) * | 1990-12-03 | 1993-06-15 | Santa Barbara Res Center | 赤外線検出器ジユワーパツケージで使用する急速冷却／低歪みハイブリツド焦点平面アレイプラツトフオーム |
| JP2022501885A (ja) * | 2018-09-20 | 2022-01-06 | インターナショナル・ビジネス・マシーンズ・コーポレーションInternational Business Machines Corporation | カピッツァ抵抗を低減させたｄｃ対応型極低温マイクロ波フィルタ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0476514B2 (enExample) | 1992-12-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |