JPS62118443U - - Google Patents

Info

Publication number
JPS62118443U
JPS62118443U JP668286U JP668286U JPS62118443U JP S62118443 U JPS62118443 U JP S62118443U JP 668286 U JP668286 U JP 668286U JP 668286 U JP668286 U JP 668286U JP S62118443 U JPS62118443 U JP S62118443U
Authority
JP
Japan
Prior art keywords
collet
semiconductor chip
paste
adsorbing
replaceable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP668286U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0632685Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986006682U priority Critical patent/JPH0632685Y2/ja
Publication of JPS62118443U publication Critical patent/JPS62118443U/ja
Application granted granted Critical
Publication of JPH0632685Y2 publication Critical patent/JPH0632685Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Die Bonding (AREA)
JP1986006682U 1986-01-20 1986-01-20 コレツト Expired - Lifetime JPH0632685Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986006682U JPH0632685Y2 (ja) 1986-01-20 1986-01-20 コレツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986006682U JPH0632685Y2 (ja) 1986-01-20 1986-01-20 コレツト

Publications (2)

Publication Number Publication Date
JPS62118443U true JPS62118443U (enExample) 1987-07-28
JPH0632685Y2 JPH0632685Y2 (ja) 1994-08-24

Family

ID=30789423

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986006682U Expired - Lifetime JPH0632685Y2 (ja) 1986-01-20 1986-01-20 コレツト

Country Status (1)

Country Link
JP (1) JPH0632685Y2 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04111735U (ja) * 1991-03-19 1992-09-29 山形日本電気株式会社 半導体ダイボンデイング装置のダイ吸着コレツト
JPH0566989U (ja) * 1992-02-04 1993-09-03 株式会社東京精密 プロービング装置用半導体ウエハステージ
JP2009006441A (ja) * 2007-06-27 2009-01-15 Kyocera Corp 真空ピンセットおよびこれを用いた基板搬送装置ならびに基板処理装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4913853U (enExample) * 1972-05-12 1974-02-05
JPS53127866U (enExample) * 1977-03-18 1978-10-11
JPS551105A (en) * 1978-06-16 1980-01-07 Hitachi Ltd Jig for replacing chip of semiconductor device
JPS5731148A (en) * 1980-07-31 1982-02-19 Fujitsu Ltd Manufacture of semiconductor device
JPS5788936U (enExample) * 1980-11-21 1982-06-01

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4913853U (enExample) * 1972-05-12 1974-02-05
JPS53127866U (enExample) * 1977-03-18 1978-10-11
JPS551105A (en) * 1978-06-16 1980-01-07 Hitachi Ltd Jig for replacing chip of semiconductor device
JPS5731148A (en) * 1980-07-31 1982-02-19 Fujitsu Ltd Manufacture of semiconductor device
JPS5788936U (enExample) * 1980-11-21 1982-06-01

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04111735U (ja) * 1991-03-19 1992-09-29 山形日本電気株式会社 半導体ダイボンデイング装置のダイ吸着コレツト
JPH0566989U (ja) * 1992-02-04 1993-09-03 株式会社東京精密 プロービング装置用半導体ウエハステージ
JP2009006441A (ja) * 2007-06-27 2009-01-15 Kyocera Corp 真空ピンセットおよびこれを用いた基板搬送装置ならびに基板処理装置

Also Published As

Publication number Publication date
JPH0632685Y2 (ja) 1994-08-24

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