JPS62118428U - - Google Patents

Info

Publication number
JPS62118428U
JPS62118428U JP1986005634U JP563486U JPS62118428U JP S62118428 U JPS62118428 U JP S62118428U JP 1986005634 U JP1986005634 U JP 1986005634U JP 563486 U JP563486 U JP 563486U JP S62118428 U JPS62118428 U JP S62118428U
Authority
JP
Japan
Prior art keywords
difference
wafer
print gap
calculated
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986005634U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0219956Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986005634U priority Critical patent/JPH0219956Y2/ja
Publication of JPS62118428U publication Critical patent/JPS62118428U/ja
Application granted granted Critical
Publication of JPH0219956Y2 publication Critical patent/JPH0219956Y2/ja
Expired legal-status Critical Current

Links

JP1986005634U 1986-01-18 1986-01-18 Expired JPH0219956Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986005634U JPH0219956Y2 (enExample) 1986-01-18 1986-01-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986005634U JPH0219956Y2 (enExample) 1986-01-18 1986-01-18

Publications (2)

Publication Number Publication Date
JPS62118428U true JPS62118428U (enExample) 1987-07-28
JPH0219956Y2 JPH0219956Y2 (enExample) 1990-05-31

Family

ID=30787400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986005634U Expired JPH0219956Y2 (enExample) 1986-01-18 1986-01-18

Country Status (1)

Country Link
JP (1) JPH0219956Y2 (enExample)

Also Published As

Publication number Publication date
JPH0219956Y2 (enExample) 1990-05-31

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