JPH0430725U - - Google Patents

Info

Publication number
JPH0430725U
JPH0430725U JP7183890U JP7183890U JPH0430725U JP H0430725 U JPH0430725 U JP H0430725U JP 7183890 U JP7183890 U JP 7183890U JP 7183890 U JP7183890 U JP 7183890U JP H0430725 U JPH0430725 U JP H0430725U
Authority
JP
Japan
Prior art keywords
alignment
matching
layer
matching pattern
deviation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7183890U
Other languages
English (en)
Japanese (ja)
Other versions
JP2530950Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990071838U priority Critical patent/JP2530950Y2/ja
Publication of JPH0430725U publication Critical patent/JPH0430725U/ja
Application granted granted Critical
Publication of JP2530950Y2 publication Critical patent/JP2530950Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1990071838U 1990-07-05 1990-07-05 基板のアライメントパターン Expired - Lifetime JP2530950Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990071838U JP2530950Y2 (ja) 1990-07-05 1990-07-05 基板のアライメントパターン

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990071838U JP2530950Y2 (ja) 1990-07-05 1990-07-05 基板のアライメントパターン

Publications (2)

Publication Number Publication Date
JPH0430725U true JPH0430725U (enExample) 1992-03-12
JP2530950Y2 JP2530950Y2 (ja) 1997-04-02

Family

ID=31609231

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990071838U Expired - Lifetime JP2530950Y2 (ja) 1990-07-05 1990-07-05 基板のアライメントパターン

Country Status (1)

Country Link
JP (1) JP2530950Y2 (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5382173A (en) * 1976-12-27 1978-07-20 Fujitsu Ltd Positioning method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5382173A (en) * 1976-12-27 1978-07-20 Fujitsu Ltd Positioning method

Also Published As

Publication number Publication date
JP2530950Y2 (ja) 1997-04-02

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term