JPS62118428U - - Google Patents
Info
- Publication number
- JPS62118428U JPS62118428U JP563486U JP563486U JPS62118428U JP S62118428 U JPS62118428 U JP S62118428U JP 563486 U JP563486 U JP 563486U JP 563486 U JP563486 U JP 563486U JP S62118428 U JPS62118428 U JP S62118428U
- Authority
- JP
- Japan
- Prior art keywords
- difference
- wafer
- print gap
- calculated
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP563486U JPH0219956Y2 ( ) | 1986-01-18 | 1986-01-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP563486U JPH0219956Y2 ( ) | 1986-01-18 | 1986-01-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62118428U true JPS62118428U ( ) | 1987-07-28 |
| JPH0219956Y2 JPH0219956Y2 ( ) | 1990-05-31 |
Family
ID=30787400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP563486U Expired JPH0219956Y2 ( ) | 1986-01-18 | 1986-01-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0219956Y2 ( ) |
-
1986
- 1986-01-18 JP JP563486U patent/JPH0219956Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0219956Y2 ( ) | 1990-05-31 |
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