JPS62116354U - - Google Patents
Info
- Publication number
- JPS62116354U JPS62116354U JP187886U JP187886U JPS62116354U JP S62116354 U JPS62116354 U JP S62116354U JP 187886 U JP187886 U JP 187886U JP 187886 U JP187886 U JP 187886U JP S62116354 U JPS62116354 U JP S62116354U
- Authority
- JP
- Japan
- Prior art keywords
- energy
- energy analysis
- electron
- analysis means
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 238000004458 analytical method Methods 0.000 claims 4
- 238000001514 detection method Methods 0.000 claims 3
- 238000001941 electron spectroscopy Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electron Tubes For Measurement (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP187886U JPS62116354U (sl) | 1986-01-10 | 1986-01-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP187886U JPS62116354U (sl) | 1986-01-10 | 1986-01-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62116354U true JPS62116354U (sl) | 1987-07-24 |
Family
ID=30780196
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP187886U Pending JPS62116354U (sl) | 1986-01-10 | 1986-01-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62116354U (sl) |
-
1986
- 1986-01-10 JP JP187886U patent/JPS62116354U/ja active Pending
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CA1048163A (en) | Process and apparatus for the elementary and chemical analysis of a sample by spectrum analysis of the energy of the secondary electrons | |
JPS62116354U (sl) | ||
JPH05256782A (ja) | 微量成分の分析用ラマン分光計 | |
GB1265638A (sl) | ||
JP2001050916A (ja) | 仕事関数測定法および仕事関数測定装置 | |
JPS5693339A (en) | Function test device of integrated circuit | |
JPS54109897A (en) | Specimen analytical apparatus in scanning electron microscope or the like | |
JPS6233246Y2 (sl) | ||
JPS6233546B2 (sl) | ||
JPH0342622Y2 (sl) | ||
JPS5831303Y2 (ja) | 電子線エネルギ分析装置 | |
JPS6324435Y2 (sl) | ||
JPS5996759U (ja) | 分析装置 | |
JPS5647751A (en) | Measuring method for concentration | |
JPS6132954U (ja) | 荷電粒子線分析装置 | |
JPS6119774U (ja) | 走査電子顕微鏡を用いた電位測定装置 | |
JPH0319947B2 (sl) | ||
JPH02242140A (ja) | ブレイクダウン分光分析方法及び装置 | |
JPS61153958U (sl) | ||
JPS54133397A (en) | Mass spectrograph | |
JPS59947B2 (ja) | デンシセン ノ エネルギ−ブンセキソウチ | |
JPS5831702B2 (ja) | オ−ジエ電子分光装置 | |
JPS63108156U (sl) | ||
JPS6387548U (sl) | ||
JPS6449948A (en) | Spectral device for fine area |