JPS62116354U - - Google Patents
Info
- Publication number
- JPS62116354U JPS62116354U JP187886U JP187886U JPS62116354U JP S62116354 U JPS62116354 U JP S62116354U JP 187886 U JP187886 U JP 187886U JP 187886 U JP187886 U JP 187886U JP S62116354 U JPS62116354 U JP S62116354U
- Authority
- JP
- Japan
- Prior art keywords
- energy
- energy analysis
- electron
- analysis means
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 238000004458 analytical method Methods 0.000 claims 4
- 238000001514 detection method Methods 0.000 claims 3
- 238000001941 electron spectroscopy Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Description
第１図は本考案の一実施例の構成図、第２図は
従来装置の構成図である。
１：電子銃、２：電子線、３：集束レンズ、４
：試料、５：オージエ電子、６：エネルギーアナ
ライザー、７：掃引電源、８：検出器、９：ロツ
クインアンプ、１０：表示装置、１１：バイアス
電源、１２：表示補正回路。
FIG. 1 is a block diagram of an embodiment of the present invention, and FIG. 2 is a block diagram of a conventional device. 1: Electron gun, 2: Electron beam, 3: Focusing lens, 4
: sample, 5: Augier electron, 6: energy analyzer, 7: sweep power supply, 8: detector, 9: lock-in amplifier, 10: display device, 11: bias power supply, 12: display correction circuit.
Claims (1)
り発生した電子をエネルギー分析するためのエネ
ルギー分析手段と、該エネルギー分析手段によつ
てエネルギー選択された電子を検出する検出手段
と、該検出手段よりの検出信号を表示する手段と
を備えた装置において、前記エネルギー分析手段
の電子線入射部に対してバイアス電圧を前記試料
に印加すると共に前記表示手段にも補正信号とし
て供給することを特徴とする電子分光装置。 A means for irradiating an electron beam onto a sample, an energy analysis means for analyzing the energy of the electrons generated by the means, a detection means for detecting the electron whose energy has been selected by the energy analysis means, and the detection means and a means for displaying a detection signal of the energy analysis means, characterized in that a bias voltage is applied to the sample to an electron beam incidence part of the energy analysis means, and is also supplied to the display means as a correction signal. Electron spectroscopy equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP187886U JPS62116354U (en) | 1986-01-10 | 1986-01-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP187886U JPS62116354U (en) | 1986-01-10 | 1986-01-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62116354U true JPS62116354U (en) | 1987-07-24 |
Family
ID=30780196
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP187886U Pending JPS62116354U (en) | 1986-01-10 | 1986-01-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62116354U (en) |
-
1986
- 1986-01-10 JP JP187886U patent/JPS62116354U/ja active Pending
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