JPS6211173U - - Google Patents

Info

Publication number
JPS6211173U
JPS6211173U JP10113685U JP10113685U JPS6211173U JP S6211173 U JPS6211173 U JP S6211173U JP 10113685 U JP10113685 U JP 10113685U JP 10113685 U JP10113685 U JP 10113685U JP S6211173 U JPS6211173 U JP S6211173U
Authority
JP
Japan
Prior art keywords
deposition chamber
metal strip
heating device
sealing device
vacuum sealing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10113685U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10113685U priority Critical patent/JPS6211173U/ja
Publication of JPS6211173U publication Critical patent/JPS6211173U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10113685U 1985-07-04 1985-07-04 Pending JPS6211173U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10113685U JPS6211173U (enrdf_load_stackoverflow) 1985-07-04 1985-07-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10113685U JPS6211173U (enrdf_load_stackoverflow) 1985-07-04 1985-07-04

Publications (1)

Publication Number Publication Date
JPS6211173U true JPS6211173U (enrdf_load_stackoverflow) 1987-01-23

Family

ID=30971605

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10113685U Pending JPS6211173U (enrdf_load_stackoverflow) 1985-07-04 1985-07-04

Country Status (1)

Country Link
JP (1) JPS6211173U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58224165A (ja) * 1982-06-22 1983-12-26 Mitsubishi Heavy Ind Ltd 真空蒸着装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58224165A (ja) * 1982-06-22 1983-12-26 Mitsubishi Heavy Ind Ltd 真空蒸着装置

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