JPH0528757Y2 - - Google Patents

Info

Publication number
JPH0528757Y2
JPH0528757Y2 JP1985198397U JP19839785U JPH0528757Y2 JP H0528757 Y2 JPH0528757 Y2 JP H0528757Y2 JP 1985198397 U JP1985198397 U JP 1985198397U JP 19839785 U JP19839785 U JP 19839785U JP H0528757 Y2 JPH0528757 Y2 JP H0528757Y2
Authority
JP
Japan
Prior art keywords
processing chamber
lower electrode
upper electrode
quartz cover
reaction products
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985198397U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62107439U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985198397U priority Critical patent/JPH0528757Y2/ja
Publication of JPS62107439U publication Critical patent/JPS62107439U/ja
Application granted granted Critical
Publication of JPH0528757Y2 publication Critical patent/JPH0528757Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1985198397U 1985-12-25 1985-12-25 Expired - Lifetime JPH0528757Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985198397U JPH0528757Y2 (enrdf_load_stackoverflow) 1985-12-25 1985-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985198397U JPH0528757Y2 (enrdf_load_stackoverflow) 1985-12-25 1985-12-25

Publications (2)

Publication Number Publication Date
JPS62107439U JPS62107439U (enrdf_load_stackoverflow) 1987-07-09
JPH0528757Y2 true JPH0528757Y2 (enrdf_load_stackoverflow) 1993-07-23

Family

ID=31159046

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985198397U Expired - Lifetime JPH0528757Y2 (enrdf_load_stackoverflow) 1985-12-25 1985-12-25

Country Status (1)

Country Link
JP (1) JPH0528757Y2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2926711B2 (ja) * 1988-05-13 1999-07-28 松下電器産業株式会社 ドライエッチング装置
US6227140B1 (en) * 1999-09-23 2001-05-08 Lam Research Corporation Semiconductor processing equipment having radiant heated ceramic liner
JP7606845B2 (ja) 2020-10-13 2024-12-26 株式会社Kelk 基板処理装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5753939A (ja) * 1980-09-17 1982-03-31 Matsushita Electric Ind Co Ltd Hakumakunodoraietsuchinguhoho
JPS57100732A (en) * 1980-12-16 1982-06-23 Nec Corp Dry etching device

Also Published As

Publication number Publication date
JPS62107439U (enrdf_load_stackoverflow) 1987-07-09

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