JPS6210838Y2 - - Google Patents
Info
- Publication number
- JPS6210838Y2 JPS6210838Y2 JP3313779U JP3313779U JPS6210838Y2 JP S6210838 Y2 JPS6210838 Y2 JP S6210838Y2 JP 3313779 U JP3313779 U JP 3313779U JP 3313779 U JP3313779 U JP 3313779U JP S6210838 Y2 JPS6210838 Y2 JP S6210838Y2
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- pattern
- deviation
- image
- inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007689 inspection Methods 0.000 claims description 99
- 238000003384 imaging method Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 53
- 230000002950 deficient Effects 0.000 description 26
- 238000010586 diagram Methods 0.000 description 10
- 238000001514 detection method Methods 0.000 description 8
- 238000003672 processing method Methods 0.000 description 7
- 230000004907 flux Effects 0.000 description 4
- 230000008676 import Effects 0.000 description 3
- GNFTZDOKVXKIBK-UHFFFAOYSA-N 3-(2-methoxyethoxy)benzohydrazide Chemical compound COCCOC1=CC=CC(C(=O)NN)=C1 GNFTZDOKVXKIBK-UHFFFAOYSA-N 0.000 description 2
- YTAHJIFKAKIKAV-XNMGPUDCSA-N [(1R)-3-morpholin-4-yl-1-phenylpropyl] N-[(3S)-2-oxo-5-phenyl-1,3-dihydro-1,4-benzodiazepin-3-yl]carbamate Chemical compound O=C1[C@H](N=C(C2=C(N1)C=CC=C2)C1=CC=CC=C1)NC(O[C@H](CCN1CCOCC1)C1=CC=CC=C1)=O YTAHJIFKAKIKAV-XNMGPUDCSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- FGUUSXIOTUKUDN-IBGZPJMESA-N C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 Chemical compound C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 FGUUSXIOTUKUDN-IBGZPJMESA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Image Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3313779U JPS6210838Y2 (zh) | 1979-03-16 | 1979-03-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3313779U JPS6210838Y2 (zh) | 1979-03-16 | 1979-03-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55134661U JPS55134661U (zh) | 1980-09-25 |
| JPS6210838Y2 true JPS6210838Y2 (zh) | 1987-03-14 |
Family
ID=28888019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3313779U Expired JPS6210838Y2 (zh) | 1979-03-16 | 1979-03-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6210838Y2 (zh) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0782542B2 (ja) * | 1988-01-29 | 1995-09-06 | 株式会社スキャンテクノロジー | 印字検査方法、印字検査装置および印刷物自動振分けシステム |
-
1979
- 1979-03-16 JP JP3313779U patent/JPS6210838Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55134661U (zh) | 1980-09-25 |
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