JPS6210778B2 - - Google Patents
Info
- Publication number
- JPS6210778B2 JPS6210778B2 JP53019216A JP1921678A JPS6210778B2 JP S6210778 B2 JPS6210778 B2 JP S6210778B2 JP 53019216 A JP53019216 A JP 53019216A JP 1921678 A JP1921678 A JP 1921678A JP S6210778 B2 JPS6210778 B2 JP S6210778B2
- Authority
- JP
- Japan
- Prior art keywords
- lap
- plate
- correction
- carrier
- plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000004048 modification Effects 0.000 claims description 10
- 238000012986 modification Methods 0.000 claims description 10
- 239000000969 carrier Substances 0.000 claims description 9
- 238000005498 polishing Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 4
- 230000008439 repair process Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000002715 modification method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1921678A JPS54112091A (en) | 1978-02-22 | 1978-02-22 | Lap surface compensator of lapping machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1921678A JPS54112091A (en) | 1978-02-22 | 1978-02-22 | Lap surface compensator of lapping machine |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54112091A JPS54112091A (en) | 1979-09-01 |
JPS6210778B2 true JPS6210778B2 (nl) | 1987-03-09 |
Family
ID=11993170
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1921678A Granted JPS54112091A (en) | 1978-02-22 | 1978-02-22 | Lap surface compensator of lapping machine |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54112091A (nl) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5649720Y2 (nl) * | 1979-04-16 | 1981-11-19 | ||
JPS6017947U (ja) * | 1983-07-18 | 1985-02-06 | 東芝機械株式会社 | ポリシング装置の洗浄用ブラシ |
JPS60161557U (ja) * | 1984-03-31 | 1985-10-26 | ホ−ヤ株式会社 | 研磨布のドレツシング具 |
JPH09314457A (ja) * | 1996-05-29 | 1997-12-09 | Speedfam Co Ltd | ドレッサ付き片面研磨装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52169187U (nl) * | 1976-06-16 | 1977-12-22 |
-
1978
- 1978-02-22 JP JP1921678A patent/JPS54112091A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS54112091A (en) | 1979-09-01 |
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