JPS62104440U - - Google Patents
Info
- Publication number
- JPS62104440U JPS62104440U JP13648185U JP13648185U JPS62104440U JP S62104440 U JPS62104440 U JP S62104440U JP 13648185 U JP13648185 U JP 13648185U JP 13648185 U JP13648185 U JP 13648185U JP S62104440 U JPS62104440 U JP S62104440U
- Authority
- JP
- Japan
- Prior art keywords
- pattern surface
- pattern
- light source
- reticle mask
- chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985136481U JPH0322904Y2 (US20090163788A1-20090625-C00002.png) | 1985-09-06 | 1985-09-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985136481U JPH0322904Y2 (US20090163788A1-20090625-C00002.png) | 1985-09-06 | 1985-09-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62104440U true JPS62104440U (US20090163788A1-20090625-C00002.png) | 1987-07-03 |
| JPH0322904Y2 JPH0322904Y2 (US20090163788A1-20090625-C00002.png) | 1991-05-20 |
Family
ID=31039635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985136481U Expired JPH0322904Y2 (US20090163788A1-20090625-C00002.png) | 1985-09-06 | 1985-09-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0322904Y2 (US20090163788A1-20090625-C00002.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6461733A (en) * | 1987-09-01 | 1989-03-08 | Mitsubishi Electric Corp | Manufacture of matrix type display device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55132039A (en) * | 1979-04-02 | 1980-10-14 | Mitsubishi Electric Corp | Forming method for repeated figure |
| JPS55140838A (en) * | 1979-04-23 | 1980-11-04 | Hitachi Ltd | Mask preparing apparatus |
| JPS55165629A (en) * | 1979-06-11 | 1980-12-24 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
| JPS58419U (ja) * | 1981-06-25 | 1983-01-05 | 富士通株式会社 | レチクル |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH550820A (de) * | 1971-04-14 | 1974-06-28 | Ciba Geigy Ag | Verfahren zur herstellung von heterocyclischen triglycidylverbindungen. |
-
1985
- 1985-09-06 JP JP1985136481U patent/JPH0322904Y2/ja not_active Expired
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55132039A (en) * | 1979-04-02 | 1980-10-14 | Mitsubishi Electric Corp | Forming method for repeated figure |
| JPS55140838A (en) * | 1979-04-23 | 1980-11-04 | Hitachi Ltd | Mask preparing apparatus |
| JPS55165629A (en) * | 1979-06-11 | 1980-12-24 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
| JPS58419U (ja) * | 1981-06-25 | 1983-01-05 | 富士通株式会社 | レチクル |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6461733A (en) * | 1987-09-01 | 1989-03-08 | Mitsubishi Electric Corp | Manufacture of matrix type display device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0322904Y2 (US20090163788A1-20090625-C00002.png) | 1991-05-20 |
