JPS6199962U - - Google Patents
Info
- Publication number
- JPS6199962U JPS6199962U JP18586984U JP18586984U JPS6199962U JP S6199962 U JPS6199962 U JP S6199962U JP 18586984 U JP18586984 U JP 18586984U JP 18586984 U JP18586984 U JP 18586984U JP S6199962 U JPS6199962 U JP S6199962U
- Authority
- JP
- Japan
- Prior art keywords
- temperature distribution
- infrared camera
- wafer
- observes
- display device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims 1
- 238000012806 monitoring device Methods 0.000 claims 1
- 238000012544 monitoring process Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 1
Landscapes
- Radiation Pyrometers (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18586984U JPS6199962U (enExample) | 1984-12-06 | 1984-12-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18586984U JPS6199962U (enExample) | 1984-12-06 | 1984-12-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6199962U true JPS6199962U (enExample) | 1986-06-26 |
Family
ID=30743329
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18586984U Pending JPS6199962U (enExample) | 1984-12-06 | 1984-12-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6199962U (enExample) |
-
1984
- 1984-12-06 JP JP18586984U patent/JPS6199962U/ja active Pending
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