JPS54971A - Growing method of ion beam crystal - Google Patents
Growing method of ion beam crystalInfo
- Publication number
- JPS54971A JPS54971A JP6715377A JP6715377A JPS54971A JP S54971 A JPS54971 A JP S54971A JP 6715377 A JP6715377 A JP 6715377A JP 6715377 A JP6715377 A JP 6715377A JP S54971 A JPS54971 A JP S54971A
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- growing method
- beam crystal
- crystal
- growing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Abstract
PURPOSE: To perform ion beam crystal growing, by commonly using anode ion beam and electron beam of each element constituting a compound.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6715377A JPS54971A (en) | 1977-06-06 | 1977-06-06 | Growing method of ion beam crystal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6715377A JPS54971A (en) | 1977-06-06 | 1977-06-06 | Growing method of ion beam crystal |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54971A true JPS54971A (en) | 1979-01-06 |
Family
ID=13336666
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6715377A Pending JPS54971A (en) | 1977-06-06 | 1977-06-06 | Growing method of ion beam crystal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54971A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5624924A (en) * | 1979-08-08 | 1981-03-10 | Agency Of Ind Science & Technol | Manufacture of solid thin film by ion beam |
JPS583222A (en) * | 1981-06-29 | 1983-01-10 | Fujitsu Ltd | Ion beam accumulation |
JPH04350397A (en) * | 1991-02-15 | 1992-12-04 | Hitachi Electron Eng Co Ltd | Cross flow fan |
-
1977
- 1977-06-06 JP JP6715377A patent/JPS54971A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5624924A (en) * | 1979-08-08 | 1981-03-10 | Agency Of Ind Science & Technol | Manufacture of solid thin film by ion beam |
JPS594847B2 (en) * | 1979-08-08 | 1984-02-01 | 工業技術院長 | Ion beam solid membrane manufacturing method |
JPS583222A (en) * | 1981-06-29 | 1983-01-10 | Fujitsu Ltd | Ion beam accumulation |
JPH04350397A (en) * | 1991-02-15 | 1992-12-04 | Hitachi Electron Eng Co Ltd | Cross flow fan |
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