JPS6199962U - - Google Patents

Info

Publication number
JPS6199962U
JPS6199962U JP18586984U JP18586984U JPS6199962U JP S6199962 U JPS6199962 U JP S6199962U JP 18586984 U JP18586984 U JP 18586984U JP 18586984 U JP18586984 U JP 18586984U JP S6199962 U JPS6199962 U JP S6199962U
Authority
JP
Japan
Prior art keywords
temperature distribution
infrared camera
wafer
observes
display device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18586984U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18586984U priority Critical patent/JPS6199962U/ja
Publication of JPS6199962U publication Critical patent/JPS6199962U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Radiation Pyrometers (AREA)
JP18586984U 1984-12-06 1984-12-06 Pending JPS6199962U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18586984U JPS6199962U (enrdf_load_stackoverflow) 1984-12-06 1984-12-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18586984U JPS6199962U (enrdf_load_stackoverflow) 1984-12-06 1984-12-06

Publications (1)

Publication Number Publication Date
JPS6199962U true JPS6199962U (enrdf_load_stackoverflow) 1986-06-26

Family

ID=30743329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18586984U Pending JPS6199962U (enrdf_load_stackoverflow) 1984-12-06 1984-12-06

Country Status (1)

Country Link
JP (1) JPS6199962U (enrdf_load_stackoverflow)

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