JPS6196347U - - Google Patents

Info

Publication number
JPS6196347U
JPS6196347U JP18204184U JP18204184U JPS6196347U JP S6196347 U JPS6196347 U JP S6196347U JP 18204184 U JP18204184 U JP 18204184U JP 18204184 U JP18204184 U JP 18204184U JP S6196347 U JPS6196347 U JP S6196347U
Authority
JP
Japan
Prior art keywords
pressure
diaphragm
pressure gauges
semiconductor
output voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18204184U
Other languages
English (en)
Japanese (ja)
Other versions
JPH041472Y2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18204184U priority Critical patent/JPH041472Y2/ja
Publication of JPS6196347U publication Critical patent/JPS6196347U/ja
Application granted granted Critical
Publication of JPH041472Y2 publication Critical patent/JPH041472Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP18204184U 1984-11-30 1984-11-30 Expired JPH041472Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18204184U JPH041472Y2 (de) 1984-11-30 1984-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18204184U JPH041472Y2 (de) 1984-11-30 1984-11-30

Publications (2)

Publication Number Publication Date
JPS6196347U true JPS6196347U (de) 1986-06-20
JPH041472Y2 JPH041472Y2 (de) 1992-01-20

Family

ID=30739577

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18204184U Expired JPH041472Y2 (de) 1984-11-30 1984-11-30

Country Status (1)

Country Link
JP (1) JPH041472Y2 (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013205403A (ja) * 2012-03-29 2013-10-07 Toshiba Corp 圧力センサ及びマイクロフォン
JP2015064375A (ja) * 2014-12-04 2015-04-09 株式会社東芝 圧力センサ及びマイクロフォン
JP2017058340A (ja) * 2015-09-18 2017-03-23 Smc株式会社 圧力センサ及びその製造方法
US10067021B2 (en) 2015-09-18 2018-09-04 Smc Corporation Pressure sensor having resistive bodies

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013205403A (ja) * 2012-03-29 2013-10-07 Toshiba Corp 圧力センサ及びマイクロフォン
US9759618B2 (en) 2012-03-29 2017-09-12 Kabushiki Kaisha Toshiba Pressure sensor and microphone
US10082430B2 (en) 2012-03-29 2018-09-25 Kabushiki Kaisha Toshiba Pressure sensor and microphone
JP2015064375A (ja) * 2014-12-04 2015-04-09 株式会社東芝 圧力センサ及びマイクロフォン
JP2017058340A (ja) * 2015-09-18 2017-03-23 Smc株式会社 圧力センサ及びその製造方法
US10048147B2 (en) 2015-09-18 2018-08-14 Smc Corporation Pressure sensor including a thin-film diaphragm provided with plural resistive bodies printed in a straight line and manufacturing method therefor
US10067021B2 (en) 2015-09-18 2018-09-04 Smc Corporation Pressure sensor having resistive bodies

Also Published As

Publication number Publication date
JPH041472Y2 (de) 1992-01-20

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