JPH0438273Y2 - - Google Patents
Info
- Publication number
- JPH0438273Y2 JPH0438273Y2 JP1984171144U JP17114484U JPH0438273Y2 JP H0438273 Y2 JPH0438273 Y2 JP H0438273Y2 JP 1984171144 U JP1984171144 U JP 1984171144U JP 17114484 U JP17114484 U JP 17114484U JP H0438273 Y2 JPH0438273 Y2 JP H0438273Y2
- Authority
- JP
- Japan
- Prior art keywords
- bridge
- pressure
- gauge
- strain
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 19
- 238000001514 detection method Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 239000013078 crystal Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984171144U JPH0438273Y2 (de) | 1984-11-12 | 1984-11-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984171144U JPH0438273Y2 (de) | 1984-11-12 | 1984-11-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6184837U JPS6184837U (de) | 1986-06-04 |
| JPH0438273Y2 true JPH0438273Y2 (de) | 1992-09-08 |
Family
ID=30728840
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984171144U Expired JPH0438273Y2 (de) | 1984-11-12 | 1984-11-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0438273Y2 (de) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5530842A (en) * | 1978-08-28 | 1980-03-04 | Nissan Motor Co Ltd | Semiconductor pressure sensor |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58136744U (ja) * | 1982-03-10 | 1983-09-14 | 富士電機株式会社 | 圧力測定装置 |
-
1984
- 1984-11-12 JP JP1984171144U patent/JPH0438273Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5530842A (en) * | 1978-08-28 | 1980-03-04 | Nissan Motor Co Ltd | Semiconductor pressure sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6184837U (de) | 1986-06-04 |
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