JPS5530842A - Semiconductor pressure sensor - Google Patents

Semiconductor pressure sensor

Info

Publication number
JPS5530842A
JPS5530842A JP10388078A JP10388078A JPS5530842A JP S5530842 A JPS5530842 A JP S5530842A JP 10388078 A JP10388078 A JP 10388078A JP 10388078 A JP10388078 A JP 10388078A JP S5530842 A JPS5530842 A JP S5530842A
Authority
JP
Japan
Prior art keywords
diffused resistors
resistors
pressure
pressure sensor
diaphragms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10388078A
Other languages
Japanese (ja)
Inventor
Takeshi Oguro
Teruyoshi Mihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP10388078A priority Critical patent/JPS5530842A/en
Publication of JPS5530842A publication Critical patent/JPS5530842A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To improve temperature characteristics as well as durability by providing diffused resistors, whose resistance is proportional to stress, to a pressure sensor that utilizes the epizoic effect of a semiconductor, and by preventing the resistors from exposing to a given atmosphere.
CONSTITUTION: Two Si diaphragms 12 and 13 are placed next to each other on a base board 11, and diffused resistors 26 to 29 are installed to the diaphragms which are covered with a cap 16 fixed to the base board 11 to form a vacuum chamber. In the board 11 are holes 19 and 20 that transfer pressure which are linked to pressure introducing pipes 24 and 25. Only one set of the hole and pipe can be used, and the other as a dummy. By so doing, the diffused resistors are kept intact from an oxidizing corresive gas introduced when detecting back pressure of an internal combustion engine for instance. It is suitable for the diffused resistors to form into a bridge.
COPYRIGHT: (C)1980,JPO&Japio
JP10388078A 1978-08-28 1978-08-28 Semiconductor pressure sensor Pending JPS5530842A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10388078A JPS5530842A (en) 1978-08-28 1978-08-28 Semiconductor pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10388078A JPS5530842A (en) 1978-08-28 1978-08-28 Semiconductor pressure sensor

Publications (1)

Publication Number Publication Date
JPS5530842A true JPS5530842A (en) 1980-03-04

Family

ID=14365740

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10388078A Pending JPS5530842A (en) 1978-08-28 1978-08-28 Semiconductor pressure sensor

Country Status (1)

Country Link
JP (1) JPS5530842A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6170431A (en) * 1984-09-14 1986-04-11 Nippon Cement Co Ltd Pressure sensor
JPS6184837U (en) * 1984-11-12 1986-06-04
JPS63151833A (en) * 1986-12-16 1988-06-24 Nec Corp Semiconductor type pressure sensor
JPH04181137A (en) * 1990-11-15 1992-06-29 Mitsubishi Electric Corp Pressure detector
US5604363A (en) * 1994-09-06 1997-02-18 Mitsubishi Denki Kabushiki Kaisha Semiconductor pressure sensor with package

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6170431A (en) * 1984-09-14 1986-04-11 Nippon Cement Co Ltd Pressure sensor
JPH0544971B2 (en) * 1984-09-14 1993-07-07 Nihon Cement
JPS6184837U (en) * 1984-11-12 1986-06-04
JPH0438273Y2 (en) * 1984-11-12 1992-09-08
JPS63151833A (en) * 1986-12-16 1988-06-24 Nec Corp Semiconductor type pressure sensor
JPH04181137A (en) * 1990-11-15 1992-06-29 Mitsubishi Electric Corp Pressure detector
US5604363A (en) * 1994-09-06 1997-02-18 Mitsubishi Denki Kabushiki Kaisha Semiconductor pressure sensor with package

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