JPS5530842A - Semiconductor pressure sensor - Google Patents
Semiconductor pressure sensorInfo
- Publication number
- JPS5530842A JPS5530842A JP10388078A JP10388078A JPS5530842A JP S5530842 A JPS5530842 A JP S5530842A JP 10388078 A JP10388078 A JP 10388078A JP 10388078 A JP10388078 A JP 10388078A JP S5530842 A JPS5530842 A JP S5530842A
- Authority
- JP
- Japan
- Prior art keywords
- diffused resistors
- resistors
- pressure
- pressure sensor
- diaphragms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To improve temperature characteristics as well as durability by providing diffused resistors, whose resistance is proportional to stress, to a pressure sensor that utilizes the epizoic effect of a semiconductor, and by preventing the resistors from exposing to a given atmosphere.
CONSTITUTION: Two Si diaphragms 12 and 13 are placed next to each other on a base board 11, and diffused resistors 26 to 29 are installed to the diaphragms which are covered with a cap 16 fixed to the base board 11 to form a vacuum chamber. In the board 11 are holes 19 and 20 that transfer pressure which are linked to pressure introducing pipes 24 and 25. Only one set of the hole and pipe can be used, and the other as a dummy. By so doing, the diffused resistors are kept intact from an oxidizing corresive gas introduced when detecting back pressure of an internal combustion engine for instance. It is suitable for the diffused resistors to form into a bridge.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10388078A JPS5530842A (en) | 1978-08-28 | 1978-08-28 | Semiconductor pressure sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10388078A JPS5530842A (en) | 1978-08-28 | 1978-08-28 | Semiconductor pressure sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5530842A true JPS5530842A (en) | 1980-03-04 |
Family
ID=14365740
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10388078A Pending JPS5530842A (en) | 1978-08-28 | 1978-08-28 | Semiconductor pressure sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5530842A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6170431A (en) * | 1984-09-14 | 1986-04-11 | Nippon Cement Co Ltd | Pressure sensor |
JPS6184837U (en) * | 1984-11-12 | 1986-06-04 | ||
JPS63151833A (en) * | 1986-12-16 | 1988-06-24 | Nec Corp | Semiconductor type pressure sensor |
JPH04181137A (en) * | 1990-11-15 | 1992-06-29 | Mitsubishi Electric Corp | Pressure detector |
US5604363A (en) * | 1994-09-06 | 1997-02-18 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor pressure sensor with package |
-
1978
- 1978-08-28 JP JP10388078A patent/JPS5530842A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6170431A (en) * | 1984-09-14 | 1986-04-11 | Nippon Cement Co Ltd | Pressure sensor |
JPH0544971B2 (en) * | 1984-09-14 | 1993-07-07 | Nihon Cement | |
JPS6184837U (en) * | 1984-11-12 | 1986-06-04 | ||
JPH0438273Y2 (en) * | 1984-11-12 | 1992-09-08 | ||
JPS63151833A (en) * | 1986-12-16 | 1988-06-24 | Nec Corp | Semiconductor type pressure sensor |
JPH04181137A (en) * | 1990-11-15 | 1992-06-29 | Mitsubishi Electric Corp | Pressure detector |
US5604363A (en) * | 1994-09-06 | 1997-02-18 | Mitsubishi Denki Kabushiki Kaisha | Semiconductor pressure sensor with package |
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