JPS6195232A - Ａｅｓ／ｓｉｍｓ複合分析装置 - Google Patents
Ａｅｓ／ｓｉｍｓ複合分析装置Info
- Publication number
- JPS6195232A JPS6195232A JP59216749A JP21674984A JPS6195232A JP S6195232 A JPS6195232 A JP S6195232A JP 59216749 A JP59216749 A JP 59216749A JP 21674984 A JP21674984 A JP 21674984A JP S6195232 A JPS6195232 A JP S6195232A
- Authority
- JP
- Japan
- Prior art keywords
- electron
- energy
- analysis
- mass
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002131 composite material Substances 0.000 title description 3
- 238000004458 analytical method Methods 0.000 claims abstract description 34
- 238000001514 detection method Methods 0.000 claims abstract description 19
- 238000010894 electron beam technology Methods 0.000 claims abstract description 7
- 238000001004 secondary ion mass spectrometry Methods 0.000 claims description 13
- 238000005259 measurement Methods 0.000 claims description 6
- 230000035945 sensitivity Effects 0.000 abstract description 20
- 238000000926 separation method Methods 0.000 abstract description 5
- 230000005284 excitation Effects 0.000 abstract description 4
- 150000002500 ions Chemical class 0.000 description 28
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2206—Combination of two or more measurements, at least one measurement being that of secondary emission, e.g. combination of secondary electron [SE] measurement and back-scattered electron [BSE] measurement
- G01N23/2208—Combination of two or more measurements, at least one measurement being that of secondary emission, e.g. combination of secondary electron [SE] measurement and back-scattered electron [BSE] measurement all measurements being of a secondary emission, e.g. combination of SE measurement and characteristic X-ray measurement
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59216749A JPS6195232A (ja) | 1984-10-16 | 1984-10-16 | Ａｅｓ／ｓｉｍｓ複合分析装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59216749A JPS6195232A (ja) | 1984-10-16 | 1984-10-16 | Ａｅｓ／ｓｉｍｓ複合分析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6195232A true JPS6195232A (ja) | 1986-05-14 |
| JPH0570256B2 JPH0570256B2 (de) | 1993-10-04 |
Family
ID=16693317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59216749A Granted JPS6195232A (ja) | 1984-10-16 | 1984-10-16 | Ａｅｓ／ｓｉｍｓ複合分析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6195232A (de) |
-
1984
- 1984-10-16 JP JP59216749A patent/JPS6195232A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0570256B2 (de) | 1993-10-04 |
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