JPS6188234U - - Google Patents

Info

Publication number
JPS6188234U
JPS6188234U JP17314484U JP17314484U JPS6188234U JP S6188234 U JPS6188234 U JP S6188234U JP 17314484 U JP17314484 U JP 17314484U JP 17314484 U JP17314484 U JP 17314484U JP S6188234 U JPS6188234 U JP S6188234U
Authority
JP
Japan
Prior art keywords
furnace
heater
main body
tray
quartz tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17314484U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17314484U priority Critical patent/JPS6188234U/ja
Publication of JPS6188234U publication Critical patent/JPS6188234U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Muffle Furnaces And Rotary Kilns (AREA)
JP17314484U 1984-11-16 1984-11-16 Pending JPS6188234U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17314484U JPS6188234U (enrdf_load_stackoverflow) 1984-11-16 1984-11-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17314484U JPS6188234U (enrdf_load_stackoverflow) 1984-11-16 1984-11-16

Publications (1)

Publication Number Publication Date
JPS6188234U true JPS6188234U (enrdf_load_stackoverflow) 1986-06-09

Family

ID=30730804

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17314484U Pending JPS6188234U (enrdf_load_stackoverflow) 1984-11-16 1984-11-16

Country Status (1)

Country Link
JP (1) JPS6188234U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03224217A (ja) * 1988-06-16 1991-10-03 Tokyo Electron Sagami Ltd 熱処理装置及び熱処理方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5390033A (en) * 1977-01-19 1978-08-08 Hitachi Ltd Heat treatment equipment
JPS5691417A (en) * 1979-12-26 1981-07-24 Fujitsu Ltd Heating treatment device for wafer

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5390033A (en) * 1977-01-19 1978-08-08 Hitachi Ltd Heat treatment equipment
JPS5691417A (en) * 1979-12-26 1981-07-24 Fujitsu Ltd Heating treatment device for wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03224217A (ja) * 1988-06-16 1991-10-03 Tokyo Electron Sagami Ltd 熱処理装置及び熱処理方法

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