JPS61183525U - - Google Patents

Info

Publication number
JPS61183525U
JPS61183525U JP19597384U JP19597384U JPS61183525U JP S61183525 U JPS61183525 U JP S61183525U JP 19597384 U JP19597384 U JP 19597384U JP 19597384 U JP19597384 U JP 19597384U JP S61183525 U JPS61183525 U JP S61183525U
Authority
JP
Japan
Prior art keywords
quartz tube
boat
furnace body
gas
support base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19597384U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19597384U priority Critical patent/JPS61183525U/ja
Publication of JPS61183525U publication Critical patent/JPS61183525U/ja
Pending legal-status Critical Current

Links

JP19597384U 1984-12-26 1984-12-26 Pending JPS61183525U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19597384U JPS61183525U (enrdf_load_stackoverflow) 1984-12-26 1984-12-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19597384U JPS61183525U (enrdf_load_stackoverflow) 1984-12-26 1984-12-26

Publications (1)

Publication Number Publication Date
JPS61183525U true JPS61183525U (enrdf_load_stackoverflow) 1986-11-15

Family

ID=30753605

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19597384U Pending JPS61183525U (enrdf_load_stackoverflow) 1984-12-26 1984-12-26

Country Status (1)

Country Link
JP (1) JPS61183525U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01207926A (ja) * 1988-02-16 1989-08-21 Toshiba Corp 半導体ウェハの処理装置
JPH0332020A (ja) * 1989-06-29 1991-02-12 Toshiba Ceramics Co Ltd 縦型拡散炉

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58108735A (ja) * 1981-12-23 1983-06-28 Fujitsu Ltd 縦型反応管用バスケツト

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58108735A (ja) * 1981-12-23 1983-06-28 Fujitsu Ltd 縦型反応管用バスケツト

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01207926A (ja) * 1988-02-16 1989-08-21 Toshiba Corp 半導体ウェハの処理装置
JPH0332020A (ja) * 1989-06-29 1991-02-12 Toshiba Ceramics Co Ltd 縦型拡散炉

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