JPS6188118A - 焦電形赤外線検出素子の製造方法 - Google Patents
焦電形赤外線検出素子の製造方法Info
- Publication number
- JPS6188118A JPS6188118A JP60231676A JP23167685A JPS6188118A JP S6188118 A JPS6188118 A JP S6188118A JP 60231676 A JP60231676 A JP 60231676A JP 23167685 A JP23167685 A JP 23167685A JP S6188118 A JPS6188118 A JP S6188118A
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- pyroelectric
- evaporation
- deposited
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 239000008188 pellet Substances 0.000 claims abstract description 20
- 239000000853 adhesive Substances 0.000 claims abstract description 18
- 238000005498 polishing Methods 0.000 claims abstract description 3
- 230000001070 adhesive effect Effects 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 239000013078 crystal Substances 0.000 abstract description 4
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 abstract description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 3
- 239000010453 quartz Substances 0.000 abstract description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 3
- 238000007740 vapor deposition Methods 0.000 abstract description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 2
- 239000010931 gold Substances 0.000 abstract description 2
- 229910052737 gold Inorganic materials 0.000 abstract description 2
- 230000008020 evaporation Effects 0.000 abstract 5
- 238000001704 evaporation Methods 0.000 abstract 5
- 238000000151 deposition Methods 0.000 abstract 1
- 229920000742 Cotton Polymers 0.000 description 1
- 229910012463 LiTaO3 Inorganic materials 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N15/00—Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
- H10N15/10—Thermoelectric devices using thermal change of the dielectric constant, e.g. working above and below the Curie point
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60231676A JPS6188118A (ja) | 1985-10-17 | 1985-10-17 | 焦電形赤外線検出素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60231676A JPS6188118A (ja) | 1985-10-17 | 1985-10-17 | 焦電形赤外線検出素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6188118A true JPS6188118A (ja) | 1986-05-06 |
| JPS6261896B2 JPS6261896B2 (enrdf_load_stackoverflow) | 1987-12-23 |
Family
ID=16927236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60231676A Granted JPS6188118A (ja) | 1985-10-17 | 1985-10-17 | 焦電形赤外線検出素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6188118A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0367108A3 (en) * | 1988-10-31 | 1991-10-02 | Honeywell Inc. | Electrical interconnector for infrared detector arrays and method for its fabrication |
-
1985
- 1985-10-17 JP JP60231676A patent/JPS6188118A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0367108A3 (en) * | 1988-10-31 | 1991-10-02 | Honeywell Inc. | Electrical interconnector for infrared detector arrays and method for its fabrication |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6261896B2 (enrdf_load_stackoverflow) | 1987-12-23 |
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