JPS6186311A - 半導体ウェハ移送装置 - Google Patents

半導体ウェハ移送装置

Info

Publication number
JPS6186311A
JPS6186311A JP13716584A JP13716584A JPS6186311A JP S6186311 A JPS6186311 A JP S6186311A JP 13716584 A JP13716584 A JP 13716584A JP 13716584 A JP13716584 A JP 13716584A JP S6186311 A JPS6186311 A JP S6186311A
Authority
JP
Japan
Prior art keywords
wafer
transfer
air
exhaust
transfer path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13716584A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0130732B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Maejima
前島　央
Hiroshi Nashihara
梨原　宏
Yoshiharu Shigyo
執行　義春
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13716584A priority Critical patent/JPS6186311A/ja
Publication of JPS6186311A publication Critical patent/JPS6186311A/ja
Publication of JPH0130732B2 publication Critical patent/JPH0130732B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
JP13716584A 1984-07-04 1984-07-04 半導体ウェハ移送装置 Granted JPS6186311A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13716584A JPS6186311A (ja) 1984-07-04 1984-07-04 半導体ウェハ移送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13716584A JPS6186311A (ja) 1984-07-04 1984-07-04 半導体ウェハ移送装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP15091376A Division JPS5375683A (en) 1976-12-17 1976-12-17 Wafer transporting apparatus

Publications (2)

Publication Number Publication Date
JPS6186311A true JPS6186311A (ja) 1986-05-01
JPH0130732B2 JPH0130732B2 (enrdf_load_stackoverflow) 1989-06-21

Family

ID=15192335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13716584A Granted JPS6186311A (ja) 1984-07-04 1984-07-04 半導体ウェハ移送装置

Country Status (1)

Country Link
JP (1) JPS6186311A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001294313A (ja) * 2000-04-12 2001-10-23 Ishikawajima Harima Heavy Ind Co Ltd 空気浮上式ベルトコンベヤ
US6584991B1 (en) * 1998-05-28 2003-07-01 Hi-Per Wash Limited Washer
JP2010179985A (ja) * 2009-02-03 2010-08-19 Wacom R & D Corp 浮上搬送装置および浮上搬送方法
JP2010195592A (ja) * 2010-03-18 2010-09-09 Olympus Corp 浮上ユニット及び基板検査装置
JP2014227273A (ja) * 2013-05-23 2014-12-08 トヨタ自動車株式会社 搬送システム

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11351738B2 (en) 2019-08-06 2022-06-07 The Boeing Company Induction welding using a heat sink and/or cooling
US11458691B2 (en) 2019-08-06 2022-10-04 The Boeing Company Induction welding using a heat sink and/or cooling

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4932837A (enrdf_load_stackoverflow) * 1972-07-25 1974-03-26
JPS4994077A (enrdf_load_stackoverflow) * 1973-01-12 1974-09-06
JPS50128881U (enrdf_load_stackoverflow) * 1974-04-08 1975-10-22
JPS5128793U (enrdf_load_stackoverflow) * 1974-08-26 1976-03-02

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4932837A (enrdf_load_stackoverflow) * 1972-07-25 1974-03-26
JPS4994077A (enrdf_load_stackoverflow) * 1973-01-12 1974-09-06
JPS50128881U (enrdf_load_stackoverflow) * 1974-04-08 1975-10-22
JPS5128793U (enrdf_load_stackoverflow) * 1974-08-26 1976-03-02

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6584991B1 (en) * 1998-05-28 2003-07-01 Hi-Per Wash Limited Washer
JP2001294313A (ja) * 2000-04-12 2001-10-23 Ishikawajima Harima Heavy Ind Co Ltd 空気浮上式ベルトコンベヤ
JP2010179985A (ja) * 2009-02-03 2010-08-19 Wacom R & D Corp 浮上搬送装置および浮上搬送方法
JP2010195592A (ja) * 2010-03-18 2010-09-09 Olympus Corp 浮上ユニット及び基板検査装置
JP2014227273A (ja) * 2013-05-23 2014-12-08 トヨタ自動車株式会社 搬送システム

Also Published As

Publication number Publication date
JPH0130732B2 (enrdf_load_stackoverflow) 1989-06-21

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